{"title":"R-T relation of SnO/sub 2/-Ag thin film in temperature pulsed operation mode","authors":"Xiaoguang Gao, Jianping Li, Xiuli He, J. Jia","doi":"10.1109/ICIA.2004.1373330","DOIUrl":null,"url":null,"abstract":"The SnO/sub 2/-Ag thin film was prepared by magnetron sputtering on the Si-based membrane substrate embedded with a platinum micro heater. The sensitive properties of the film to H/sub 2/S were investigated, and the R-T relation was measured in temperature pulsed operation mode and in simple temperature ramp mode in order to understand the sensitive properties. The results are used to discuss the effect of Ag additive on the R-T relation and sensitive properties of the film. The variation of film resistance shows that the silver promotes the chemical processes on the surface of films. The R-T relation measured in temperature pulsed operation mode can be used to understand the sensing properties of SnO/sub 2/-Ag film.","PeriodicalId":297178,"journal":{"name":"International Conference on Information Acquisition, 2004. Proceedings.","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Information Acquisition, 2004. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIA.2004.1373330","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The SnO/sub 2/-Ag thin film was prepared by magnetron sputtering on the Si-based membrane substrate embedded with a platinum micro heater. The sensitive properties of the film to H/sub 2/S were investigated, and the R-T relation was measured in temperature pulsed operation mode and in simple temperature ramp mode in order to understand the sensitive properties. The results are used to discuss the effect of Ag additive on the R-T relation and sensitive properties of the film. The variation of film resistance shows that the silver promotes the chemical processes on the surface of films. The R-T relation measured in temperature pulsed operation mode can be used to understand the sensing properties of SnO/sub 2/-Ag film.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
