{"title":"A Silicon Micromechanical Resonator Based CMOS Bandpass Sigma-Delta Modulator","authors":"Y. Xu, R. Yu, W. Hsu, A.R. Brown","doi":"10.1109/ASSCC.2006.357872","DOIUrl":null,"url":null,"abstract":"This paper describes a bandpass SigmaDelta modulator employing a silicon micromechanical resonator as the loop filter. The micromechanical resonator is chosen primarily for its high quality factor and low power consumption. A 2nd-order prototype bandpass SigmaDelta modulator is realized in a 0.35-mum CMOS process and tested with a 19.6-MHz silicon micromechanical resonator. The measured results show a peak SNDR of 51 dB and a dynamic range of 52.5 dB in a 200-kHz signal bandwidth.","PeriodicalId":142478,"journal":{"name":"2006 IEEE Asian Solid-State Circuits Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Asian Solid-State Circuits Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASSCC.2006.357872","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
This paper describes a bandpass SigmaDelta modulator employing a silicon micromechanical resonator as the loop filter. The micromechanical resonator is chosen primarily for its high quality factor and low power consumption. A 2nd-order prototype bandpass SigmaDelta modulator is realized in a 0.35-mum CMOS process and tested with a 19.6-MHz silicon micromechanical resonator. The measured results show a peak SNDR of 51 dB and a dynamic range of 52.5 dB in a 200-kHz signal bandwidth.
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