{"title":"μ-XRFA and μ-EXAFS measurements of organic and non-organic samples: status report","authors":"A. Erko","doi":"10.1117/12.675625","DOIUrl":null,"url":null,"abstract":"The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (μXRFA), micro-extended X-ray absorption fine structure (μEXAFS), micro-X-ray absorption near-edge structure (μXANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of μXRFA mapping and μEXAFS and μXANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1nm has been achieved.","PeriodicalId":406438,"journal":{"name":"SPIE Optics + Photonics","volume":"241 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Optics + Photonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.675625","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (μXRFA), micro-extended X-ray absorption fine structure (μEXAFS), micro-X-ray absorption near-edge structure (μXANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of μXRFA mapping and μEXAFS and μXANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1nm has been achieved.
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