NEMS-based optical phase modulator fabricated on Silicon-On-Insulator

K. Van Acoleyen, J. Roels, T. Claes, D. van Thourhout, R. Baets
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引用次数: 13

Abstract

We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9µm long slot waveguide an optical phase change of 60° was observed.
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基于nems的绝缘体上硅光相位调制器
我们提出了一种紧凑的低功率光相位调制器,该调制器是由下蚀刻槽波导组成的。通过在9 μ m长的槽波导上施加15V的电压,观察到60°的光学相位变化。
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