T. Metcalf, B. Houston, J. E. Butler, T. Feygelson
{"title":"Low temperature mechanical properties of nanocrystalline diamond films","authors":"T. Metcalf, B. Houston, J. E. Butler, T. Feygelson","doi":"10.1109/FREQ.2006.275376","DOIUrl":null,"url":null,"abstract":"Measurements of the mechanical properties - internal friction and shear modulus - of several nanocrystalline diamond films grown on silicon resonator substrates is reported. The internal friction measurements of 0.5 mum boron-doped and boron-free nanocrystalline diamond films show that the boron concentration does not appear to be correlated with the previously reported internal friction peak at 1-2 K. Rather, a heavily boron-doped film appears to have an internal friction peak at 10 K. The low-temperature internal friction of these films is consistent with that of films reported upon earlier, and is in the range 2 times 10-6 les Q-1 les 6 times 10-6","PeriodicalId":445945,"journal":{"name":"2006 IEEE International Frequency Control Symposium and Exposition","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Frequency Control Symposium and Exposition","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2006.275376","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Measurements of the mechanical properties - internal friction and shear modulus - of several nanocrystalline diamond films grown on silicon resonator substrates is reported. The internal friction measurements of 0.5 mum boron-doped and boron-free nanocrystalline diamond films show that the boron concentration does not appear to be correlated with the previously reported internal friction peak at 1-2 K. Rather, a heavily boron-doped film appears to have an internal friction peak at 10 K. The low-temperature internal friction of these films is consistent with that of films reported upon earlier, and is in the range 2 times 10-6 les Q-1 les 6 times 10-6
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