{"title":"Multilayer Damage and Repair Issues in Soft-X-Ray Projection Lithography","authors":"D. Gaines, R. Spitzer, N. Ceglio","doi":"10.1364/sxray.1992.tub5","DOIUrl":null,"url":null,"abstract":"Current soft x-ray projection lithography (SXPL) system designs require multilayer coated optics to operate at levels approaching predicted maximums for near normal incidence reflectivity. Effects that (potentially) degrade multilayer performance in the SXPL environment are discussed. Appropriate repair strategies are suggested, and preliminary results are presented.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1992.tub5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Current soft x-ray projection lithography (SXPL) system designs require multilayer coated optics to operate at levels approaching predicted maximums for near normal incidence reflectivity. Effects that (potentially) degrade multilayer performance in the SXPL environment are discussed. Appropriate repair strategies are suggested, and preliminary results are presented.
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