{"title":"Front Matter: Volume 11177","authors":"Emlc, U. Behringer","doi":"10.1117/12.2551516","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":306447,"journal":{"name":"35th European Mask and Lithography Conference (EMLC 2019)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"35th European Mask and Lithography Conference (EMLC 2019)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2551516","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}