J. Segovia-Fernandez, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza
{"title":"Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators","authors":"J. Segovia-Fernandez, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza","doi":"10.1109/TRANSDUCERS.2013.6627307","DOIUrl":null,"url":null,"abstract":"This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (Wa) and length (La) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main source of damping is associated with anchor losses at 220 MHz and interfacial losses at 1.05 GHz. Furthermore, finite element analysis (FEA) was used to model anchor losses in AlN CMRs, exhibiting excellent agreement with the measurements.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"26","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2013.6627307","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 26
Abstract
This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (Wa) and length (La) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main source of damping is associated with anchor losses at 220 MHz and interfacial losses at 1.05 GHz. Furthermore, finite element analysis (FEA) was used to model anchor losses in AlN CMRs, exhibiting excellent agreement with the measurements.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
