O. Kutova, T. Borodinova, M. Dusheiko, B. Loboda, T. Obukhova, S. V. Tkach
{"title":"Influence of Pt Nanoparticles in Porous Silicon on Performance of MISFET Sensor","authors":"O. Kutova, T. Borodinova, M. Dusheiko, B. Loboda, T. Obukhova, S. V. Tkach","doi":"10.1109/ELNANO.2018.8477500","DOIUrl":null,"url":null,"abstract":"In the paper influence of Pt nanoparticles in porous silicon on FET sensor performance is investigated. It is shown that combination of porous silicon with metal nanoparticles decreases response time and increases sensitivity of hydrogen peroxide sensor up to 8 mkA/%.","PeriodicalId":269665,"journal":{"name":"2018 IEEE 38th International Conference on Electronics and Nanotechnology (ELNANO)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE 38th International Conference on Electronics and Nanotechnology (ELNANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ELNANO.2018.8477500","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In the paper influence of Pt nanoparticles in porous silicon on FET sensor performance is investigated. It is shown that combination of porous silicon with metal nanoparticles decreases response time and increases sensitivity of hydrogen peroxide sensor up to 8 mkA/%.