{"title":"Recent trends in optical MEMS for telecommunication applications","authors":"D. Khalil","doi":"10.1109/PAIA.2004.1353817","DOIUrl":null,"url":null,"abstract":"Recent progress in the development of the optical micro-electro-mechanical systems (MEMS) is reviewed with emphasis on their applications in the field of telecommunications. Both the scientific and the industrial aspects of the components are considered. Different structures are reported and, when necessary, briefly explained showing the main difficulties in development as well as state of the art performance. The possibility of industrialization has gained special interest in our discussion.","PeriodicalId":403020,"journal":{"name":"The Fourth Workshop on Photonics and Its Application, 2004.","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Fourth Workshop on Photonics and Its Application, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PAIA.2004.1353817","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Recent progress in the development of the optical micro-electro-mechanical systems (MEMS) is reviewed with emphasis on their applications in the field of telecommunications. Both the scientific and the industrial aspects of the components are considered. Different structures are reported and, when necessary, briefly explained showing the main difficulties in development as well as state of the art performance. The possibility of industrialization has gained special interest in our discussion.
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