Study and Analysis of Modified Junction-less SOI MOSFET at 18nm Gate Length

Vibhaas Saxena, Yash Gupta, Suresh Kumar, Nitu Rao, V. Mishra
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Abstract

The Silicon-on-Insulator junction-less transistors (JLTSOI) were commenced as a competent device for nano-scale applications. The main challenges that can limit the use of junction-less SOI transistors are found out to be the high leakage current, low Ion to Ioff (on-current to off-current) ratio and sub-threshold slope. To compensate this, a new window with slightly doped p-type silicon is opened inside the buried oxide region of a conventional junction-less SOI MOSFET [1]. This paper focuses on optimizing the new windows opened below the channel area, gate length and buried oxide thickness (BOX) thickness of modified junction-less SOI MOSFET, so as to improve the electrical performance at less chip area. In the conventional junction-less transistor this reorganization form a reduction sheet on the interface of the channel area and the new window successfully reduces the amount of leakage current inside the transistor. Considering the diverse spectra of the parameters, the re-enactment of the structures referenced in the examination indicated that the optimized device has superior for the low power digital applications.
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18nm栅极长度改良无结SOI MOSFET的研究与分析
绝缘体上硅无结晶体管(JLTSOI)作为纳米级应用的合格器件而开始。研究发现,限制无结SOI晶体管使用的主要挑战是高泄漏电流、低离子关断比(通断比)和亚阈值斜率。为了弥补这一点,在传统无结SOI MOSFET的埋藏氧化区中打开了一个新窗口,其中含有少量掺杂的p型硅[1]。本文重点对改进的无结SOI MOSFET的沟道面积下新开窗、栅极长度和埋氧化层厚度(BOX)进行优化,以提高小片面积下的电性能。在传统的无结晶体管中,这种重组在沟道区域的界面上形成缩小片,并且新窗口成功地减少了晶体管内部的漏电流量。考虑到参数谱的多样性,对测试中参考结构的重构表明,优化后的器件在低功耗数字应用中具有优势。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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