Micro channel fabrication in PMMA substrates using CO/sub 2/ laser and sacrificial mask process

International Conference on Information Acquisition, 2004. Proceedings. Pub Date : 2004-06-21 DOI:10.1109/ICIA.2004.1373332

Guangyi Shi, Qiang Huang, W.J. Li, Wenqian Huang, Yanyun Ren, Jun Li, Kejie Li

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引用次数: 1

Abstract

A novel system for 3D microchannel fabrication based on CO/sub 2/ laser-micromachining is presented. The system consists of a CO/sub 2/, laser focusing system and a 3D precision positioning platform. The CO/sub 2/ laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO/sub 2/ laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.

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采用CO/sub /激光和牺牲掩膜工艺制备PMMA基板微通道

提出了一种基于CO/sub /激光微加工的三维微通道加工系统。该系统由CO/sub /、激光聚焦系统和三维精密定位平台组成。CO/sub - 2/激光聚焦系统可以调节光束直径微米级的高能激光束，三维平台的运动精度达到微米级。通过控制CO/sub /激光器和平台，可以实现在PMMA(聚甲基丙烯酸甲酯)中制备三维微通道系统。一种特殊的“牺牲掩膜”工艺被用于生产微米尺寸的半透明通道，表面粗糙度低。实验结果证实了系统的有效性。有可能，我们开发的系统可以自动在PMMA基板上生产3D微通道，而不需要目前所需的昂贵且耗时的光刻和热压印工艺。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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International Conference on Information Acquisition, 2004. Proceedings.

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