Parameter Characterization of Silicon-Based Patterned Shield and Patterned Ground Shield Coplanar Waveguides

Abstract

An accurate procedure is proposed to characterize distributed parameters of silicon-based patterned shield and patterned ground shield coplanar waveguides (PS-and PGS-CPWs), where skin and proximity effects are treated appropriately. These interconnects can include symmetrical, asymmetrical, non-uniform, and even differential transmission lines. Numerical investigations are carried out to show the influence of various geometrical and physical parameters on the frequency-dependent distributed parameters, which is important in the design of silicon-based microwave and millimeter wave integrated circuits.