Thermostable porous Ag die-attach structure for high-temperature power devices

S. Noh, Hao Zhang, K. Suganuma
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引用次数: 4

Abstract

In this work, efforts were made to prepare a thermostable die-attach structure which includes stable sintered porous Ag and multi-layer surface metallization. Silicon carbide particles (SiCp) were added into the Ag sintering paste to improve the high-temperature reliability of sintered Ag joints. Presence of SiCp in the bonding structures inhibited the coarsening of the porous Ag network during high temperature storage (HTS) tests, and the morphology remains similar to that of the as-sintered state. In addition to the Ag paste, on the side of DBC substrates, the thermal reliability of various surface metallization such as Ni, Ti and Pt were also evaluated by shear strength, cross-section morphology and on-resistance test. The results indicated that Ti and Pt diffusion barrier layers played an active role in inhibiting the oxidation of Cu and inter-diffusion between Cu and Ag at high temperatures exceeding 250 °C. While Ni barrier layer showed a relatively weak barrier effect due to the generation of thin oxide layer between Ag and Ni. The changes of on-resistance indicated that Pt metallization has a relatively better electrical property comparing to that of Ti and Ni. Ag metallization which lacks of barrier layers showed a severe growth of oxide layer between Ag and Cu, however, the on-resistance showed less changes, which needs further studies.
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用于高温功率器件的热稳定多孔银模贴附结构
在这项工作中,努力制备一种热稳定的模贴结构,包括稳定的烧结多孔银和多层表面金属化。在银烧结浆料中加入碳化硅颗粒(SiCp),提高了烧结银接头的高温可靠性。在高温储存(HTS)测试中,SiCp在键合结构中的存在抑制了多孔银网络的粗化,并且形貌保持与烧结状态相似。除了银浆外,在DBC衬底侧面,还通过剪切强度、截面形貌和导通电阻测试来评价Ni、Ti和Pt等各种表面金属化的热可靠性。结果表明,在超过250℃的高温下,Ti和Pt扩散阻挡层对Cu的氧化和Cu与Ag之间的相互扩散起着积极的抑制作用。而Ni势垒层由于在Ag和Ni之间形成了较薄的氧化层而表现出较弱的势垒效应。导通电阻的变化表明,与Ti和Ni相比,Pt金属化具有相对更好的电学性能。缺乏势垒层的Ag金属化过程中,Ag和Cu之间的氧化层生长严重,但导通电阻变化不大,有待进一步研究。
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Increasing Electrical and Thermal Performances of VRMs by Using Folded Flexible Substrate Reflectometry Based SOH Estimation Scheme for a SiC Buck Converter Having Branched Network 3D-PEIM 2018 Copyright Page Nearly perfect Ag joints prepared by Ag stress-migration-bonding (SMB) process Improvement of Ag sintering Quality on Cu surface at Hydrogen atmosphere
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