Josef Kudelka, Tomás Martínek, M. Navrátil, V. Kresálek
{"title":"The effect of tip speed in AFM scratching","authors":"Josef Kudelka, Tomás Martínek, M. Navrátil, V. Kresálek","doi":"10.1109/DT.2016.7557167","DOIUrl":null,"url":null,"abstract":"In this study, we investigated the effect of tip speed in AFM scratching. Three testing patterns were engraved on polycarbonate substrate at different scratching parameters. The subsequent characterization of fabricated structures was performed using the identical atomic force microscope. It was found that the depth and width depend only weakly on tip speed.","PeriodicalId":281446,"journal":{"name":"2016 International Conference on Information and Digital Technologies (IDT)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2016-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Information and Digital Technologies (IDT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DT.2016.7557167","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this study, we investigated the effect of tip speed in AFM scratching. Three testing patterns were engraved on polycarbonate substrate at different scratching parameters. The subsequent characterization of fabricated structures was performed using the identical atomic force microscope. It was found that the depth and width depend only weakly on tip speed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
