Josef Kudelka, Tomás Martínek, M. Navrátil, V. Kresálek
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引用次数: 3
Abstract
In this study, we investigated the effect of tip speed in AFM scratching. Three testing patterns were engraved on polycarbonate substrate at different scratching parameters. The subsequent characterization of fabricated structures was performed using the identical atomic force microscope. It was found that the depth and width depend only weakly on tip speed.