{"title":"High field stress induced leakage current in 3.0-nm NO-grown gate dielectric films","authors":"Z. Yao, H. B. Harrison, S. Dimitrijev, Y. Yeow","doi":"10.1109/TENCON.1995.496391","DOIUrl":null,"url":null,"abstract":"In this paper, stress induced leakage current (SILC) has been investigate in 3.0-nm nitric oxide (NO) grown gate dielectric films. MOS capacitors with 3.0-nm NO-grown films have much lower SILC compared to those reported results with N/sub 2/O oxides or pure oxides under high field stresses.","PeriodicalId":425138,"journal":{"name":"1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TENCON.1995.496391","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, stress induced leakage current (SILC) has been investigate in 3.0-nm nitric oxide (NO) grown gate dielectric films. MOS capacitors with 3.0-nm NO-grown films have much lower SILC compared to those reported results with N/sub 2/O oxides or pure oxides under high field stresses.
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