{"title":"A chemosensitive-based ammonia gas sensor with PANI/PEO–ZnO nanofiber composites sensing layer","authors":"Gözde Konuk Ege, Özge Akay, Hüseyin Yüce","doi":"10.1108/mi-04-2023-0051","DOIUrl":null,"url":null,"abstract":"Purpose This study aims to investigate the ammonia-sensing performance of polyaniline/polyethylene oxide (PANI/PEO) and polyaniline/polyethylene oxide/zinc oxide (PANI/PEO-ZnO) composite nanofibers at room temperature. Design/methodology/approach Gas sensor structures were fabricated using microfabrication techniques. First, onto the SiO 2 wafer, gold electrodes were fabricated via thermal evaporation. PANI/PEO nanofibers were produced by the electrospinning method, and the ZnO layer was deposited by using radio frequency (RF) magnetron sputtering on the electrospun nanofibers as a sensing layer. Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM) and X-ray diffraction were performed to characterize the analysis of nanofibers. After all, gas sensing analysis of PANI/PEO and PANI/PEO/ZnO nanofibers was conducted using an experimental setup at room temperature conditions. Furthermore, the impact of humidity (17%–90% RH) on the sensor resistance was actively investigated. Findings FTIR analysis confirms the presence of functional groups of PANI, PEO and ZnO in nanofiber structure. SEM micrographs demonstrate beads-free, thinner and smooth nanofibers with ZnO contribution to electrospun PANI/PEO nanofibers. Moreover, according to the gas sensing results, the PANI/PEO nanofibers exhibit 115 s and 457 s response time and recovery time, respectively. However, the PANI/PEO/ZnO nanofibers exhibit 245 s and 153 s response time and recovery time, respectively. PANI/PEO/MOx composite nanofibers ensure stability to the NH 3 gas owing to the high surface/volume ratio and decrease in the humidity dependence of gas sensors, making gas sensors more stable to the environment. Originality/value In this study, ZnO was deposited via RF magnetron sputtering techniques on PANI/PEO nanofibers as a different approach instead of in situ polymerization to investigate and enhance the sensor response and recovery time of the PANI/PEO/ZnO and PANI/PEO composite nanofibers to ammonia. These results indicated that ZnO can enhance the sensing properties of conductive polymer-based resistive sensors.","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":"5 1","pages":"0"},"PeriodicalIF":0.7000,"publicationDate":"2023-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics International","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1108/mi-04-2023-0051","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Purpose This study aims to investigate the ammonia-sensing performance of polyaniline/polyethylene oxide (PANI/PEO) and polyaniline/polyethylene oxide/zinc oxide (PANI/PEO-ZnO) composite nanofibers at room temperature. Design/methodology/approach Gas sensor structures were fabricated using microfabrication techniques. First, onto the SiO 2 wafer, gold electrodes were fabricated via thermal evaporation. PANI/PEO nanofibers were produced by the electrospinning method, and the ZnO layer was deposited by using radio frequency (RF) magnetron sputtering on the electrospun nanofibers as a sensing layer. Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM) and X-ray diffraction were performed to characterize the analysis of nanofibers. After all, gas sensing analysis of PANI/PEO and PANI/PEO/ZnO nanofibers was conducted using an experimental setup at room temperature conditions. Furthermore, the impact of humidity (17%–90% RH) on the sensor resistance was actively investigated. Findings FTIR analysis confirms the presence of functional groups of PANI, PEO and ZnO in nanofiber structure. SEM micrographs demonstrate beads-free, thinner and smooth nanofibers with ZnO contribution to electrospun PANI/PEO nanofibers. Moreover, according to the gas sensing results, the PANI/PEO nanofibers exhibit 115 s and 457 s response time and recovery time, respectively. However, the PANI/PEO/ZnO nanofibers exhibit 245 s and 153 s response time and recovery time, respectively. PANI/PEO/MOx composite nanofibers ensure stability to the NH 3 gas owing to the high surface/volume ratio and decrease in the humidity dependence of gas sensors, making gas sensors more stable to the environment. Originality/value In this study, ZnO was deposited via RF magnetron sputtering techniques on PANI/PEO nanofibers as a different approach instead of in situ polymerization to investigate and enhance the sensor response and recovery time of the PANI/PEO/ZnO and PANI/PEO composite nanofibers to ammonia. These results indicated that ZnO can enhance the sensing properties of conductive polymer-based resistive sensors.
期刊介绍:
Microelectronics International provides an authoritative, international and independent forum for the critical evaluation and dissemination of research and development, applications, processes and current practices relating to advanced packaging, micro-circuit engineering, interconnection, semiconductor technology and systems engineering. It represents a current, comprehensive and practical information tool. The Editor, Dr John Atkinson, welcomes contributions to the journal including technical papers, research papers, case studies and review papers for publication. Please view the Author Guidelines for further details.
Microelectronics International comprises a multi-disciplinary study of the key technologies and related issues associated with the design, manufacture, assembly and various applications of miniaturized electronic devices and advanced packages. Among the broad range of topics covered are:
• Advanced packaging
• Ceramics
• Chip attachment
• Chip on board (COB)
• Chip scale packaging
• Flexible substrates
• MEMS
• Micro-circuit technology
• Microelectronic materials
• Multichip modules (MCMs)
• Organic/polymer electronics
• Printed electronics
• Semiconductor technology
• Solid state sensors
• Thermal management
• Thick/thin film technology
• Wafer scale processing.