Ultrasonic vibration measurement using heterodyne interferometry and SDR phase meter

VĂN ĐẢM PHẠM, THẾ TÀI NGUYỄN, THÀNH ĐÔNG NGUYỄN, THANH TÙNG VŨ, HỒNG HẢI HOÀNG, TOÀN THẮNG VŨ, THỊ PHƯƠNG MAI NGUYỄN
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Abstract

Ultrasonic vibration measurement and the development of ultrasonic vibration sensors have a significant impact on underwater pattern detection, providing good support for the exploitation and usage of marine resources. Advanced digital signal processing algorithms improve mechanical displacement measurements using ultrasonic speed and pm-level interferometers in real-time. In recent years, developing digital algorithms and employing low-cost software-defined radio (SDR) software applied to communication systems and other general-purpose systems with flexible solutions are essential in modern industrial applications. Specifically, the SDR can be consistent with real-time phase-change measurements of MHz-frequency interference signals for a heterodyne interferometer. This paper combines a heterodyne interferometer and a real-time SDR phase meter, demonstrating an ultrasonic vibration instrument's high-speed vibrating measurement capabilities. A double-pass interferometer is implemented to produce interference signals modulated with a sine waveform phase change associated with a tool's ultrasonic vibrating displacement, calculated by the phase meter's quadrature demodulation algorithm. The measurement results show that the system detects the sine-wave vibration trajectory generated by the vibrator at a frequency of 20 kHz and an amplitude of ~460 nm. The principle of the measurement system, instrumentations, experiments, and results are discussed in the paper.
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采用外差干涉法和SDR相位计进行超声振动测量
超声振动测量和超声振动传感器的发展对水下模式检测产生了重大影响,为海洋资源的开发利用提供了良好的支撑。先进的数字信号处理算法改进机械位移测量使用超声速度和pm级干涉仪实时。近年来,开发数字算法和采用低成本的软件定义无线电(SDR)软件,以灵活的解决方案应用于通信系统和其他通用系统,是现代工业应用中必不可少的。具体来说,SDR可以与外差干涉仪的mhz频率干扰信号的实时相位变化测量相一致。本文结合外差干涉仪和实时SDR相位计,展示了超声振动仪的高速振动测量能力。通过相位计的正交解调算法计算,采用双通干涉仪产生与工具超声振动位移相关的正弦波形相位变化调制的干涉信号。测量结果表明,该系统检测到振动器产生的频率为20 kHz、幅值为~460 nm的正弦波振动轨迹。本文讨论了测量系统的原理、仪器、实验和结果。
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