{"title":"Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage","authors":"Jinfu SIMA, Leijie LAI, Pengzhi LI, Yu FANG, Limin ZHU","doi":"10.37188/ope.20233120.2964","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":39778,"journal":{"name":"Guangxue Jingmi Gongcheng/Optics and Precision Engineering","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Guangxue Jingmi Gongcheng/Optics and Precision Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.37188/ope.20233120.2964","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Materials Science","Score":null,"Total":0}
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