Methods and features of measuring the thermal resistance of integrated microwave amplifiers on heterojunction bipolar transistors

Q4 Materials Science Radioelektronika, Nanosistemy, Informacionnye Tehnologii Pub Date : 2023-09-28 DOI:10.17725/rensit.2023.15.214

Vyacheslav A. Sergeev, Vitaliy I. Smirnov, Andrey A. Gavrikov

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Abstract

The method of measuring the thermal resistance (TR) of semiconductor devices (SD) according to OST 11 0944-96 and the original modulation method implemented in the hardware and software package developed by the authors are described. In both methods, the SD is heated by pulsed power, and the temperature of its active region (transition) is determined by a change in the temperature–sensitive parameter (TSP) - the voltage at the SD at a low current passed through the SD in the pauses between the pulses of the heating current. The measurement error of the vehicle by the standard method strongly depends on the choice of the duration of the heating current pulses and the delay time when measuring the voltage at the SD after switching off the heating current. In the modulation method, the duration of the heating current pulses is changed according to the harmonic law, and according to the results of measuring the voltage at the SD during the passage of the heating and measuring current, the modulus of the thermal impedance of the SD is determined as the ratio of the first harmonic of the transition temperature to the first harmonic of the heating power. According to the frequency dependence of the thermal impedance module, the components of the vehicle of the object are determined, while the requirements for maintaining the temperature of the device body are significantly reduced and, as a result, the measurement error of the vehicle is reduced. The results of comparative measurements of the TR of integrated microwave amplifiers (amplifying cascades) on InGaP/GaP HBT by the standard and modulation method at different values of the amplitude of the heating current are presented. It is shown that the results of measuring the TR of integrated microwave amplifiers by both methods are in good agreement with each other. It is established that with an increase in the amplitude of the heating current, the TR junction-case of integrated microwave amplifiers decreases, which is due to the alignment of current distribution in the structure of the GBT during heating.

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异质结双极晶体管集成微波放大器热阻测量方法及特点

介绍了根据OST 11 0944-96标准测量半导体器件热阻(TR)的方法以及在自己开发的硬件和软件包中实现的原始调制方法。在这两种方法中，SD都是由脉冲功率加热的，其有源区域(跃迁)的温度由温度敏感参数(TSP)的变化决定——在加热电流脉冲之间的停顿中，低电流通过SD的SD处电压。标准方法对车辆的测量误差在很大程度上取决于加热电流脉冲持续时间的选择和切断加热电流后测量SD处电压的延迟时间。在调制方法中，根据谐波规律改变加热电流脉冲的持续时间，根据加热和测量电流通过过程中SD处电压的测量结果，确定SD热阻抗的模量为过渡温度的一次谐波与加热功率的一次谐波之比。根据热阻抗模块的频率依赖性，确定了被测物体的载具部件，同时大大降低了对保持装置本体温度的要求，从而降低了载具的测量误差。给出了在不同加热电流幅值下，采用标准和调制方法在InGaP/GaP HBT上对集成微波放大器(放大级联)的TR进行对比测量的结果。结果表明，两种方法对集成微波放大器的TR测量结果吻合较好。结果表明，随着加热电流幅值的增大，集成微波放大器的TR结壳减小，这是由于加热过程中GBT结构中电流分布的对准造成的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Radioelektronika, Nanosistemy, Informacionnye Tehnologii Materials Science-Materials Science (miscellaneous)

CiteScore

0.60

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0.00%

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期刊介绍： Journal “Radioelectronics. Nanosystems. Information Technologies” (abbr RENSIT) publishes original articles, reviews and brief reports, not previously published, on topical problems in radioelectronics (including biomedical) and fundamentals of information, nano- and biotechnologies and adjacent areas of physics and mathematics. The authors of the journal are academicians, corresponding members and foreign members of the Russian Academy of Natural Sciences (RANS) and their colleagues, as well as other russian and foreign authors on the proposal of the members of RANS, which can be obtained by the author before sending articles to the editor or after its arrival on the recommendation of a member of the editorial board or another member of the RANS, who gave the opinion on the article at the request of the editior. The editors will accept articles in both Russian and English languages. Articles are internally peer reviewed (double-blind peer review) by members of the Editorial Board. Some articles undergo external review, if necessary. Designed for researchers, graduate students, physics students of senior courses and teachers. It turns out 2 times a year (that includes 2 rooms)