Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

Q3 Materials Science Guangxue Jingmi Gongcheng/Optics and Precision Engineering Pub Date : 2023-01-01 DOI:10.37188/ope.20233118.2675

Yunzhuang CHEN, Leijie LAI, Pengzhi LI, Limin ZHU

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全叶弹簧式空间大行程并联柔性微定位平台及轨迹控制

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来源期刊

Guangxue Jingmi Gongcheng/Optics and Precision Engineering Materials Science-Electronic, Optical and Magnetic Materials

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2.40

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