Manufacturability and performance of microdisk resonators from the AIM Photonics foundry

Abstract

The field of integrated photonics relies heavily on foundries to produce not only novel technologies, but also reliable ones. Examining the output of complementary metal-oxide-semiconductor (CMOS) foundries such as that affiliated with the AIM Photonics partnership provides valuable insight into the manufacturability of integrated photonic telecommunications devices when produced in large numbers. We present an analysis of the passive performance of numerous silicon microdisk resonators. At ambient temperature, the resonators exhibit on average insertion loss of ∼6 dB, a free spectral range of ∼25 nm, and quality factors of Q > 8.3 × 10 3 . We also report a study of temperature dependence on the resonant wavelength of the devices. Our characterization of these resonators demonstrates reproducibility of qualities related to accuracy in fabrication, as well as in experimental measurement.