{"title":"FIB-SEM Tomography Acquisition and Data Processing Optimization for Logic and Memory Structures","authors":"Heiko Stegmann, Alexandre Laquerre","doi":"10.31399/asm.cp.istfa2023p0387","DOIUrl":null,"url":null,"abstract":"Abstract Focused-Ion Beam Scanning Electron Microscopy (FIB-SEM) tomography is a high resolution three-dimensional (3D) imaging method with applications in failure analysis and metrology of semiconductor devices. For the smallest logic and memory structures currently in use, it requires single-digit nanometer 3D resolution. In this resolution range, avoiding distortion artifacts in the data becomes crucial. We present examples and discuss ways to reduce the likelihood of such artifacts during the data acquisition, as well as how to mitigate them in post-processing, and therefore increase the data quality.","PeriodicalId":20443,"journal":{"name":"Proceedings","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2023p0387","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Abstract Focused-Ion Beam Scanning Electron Microscopy (FIB-SEM) tomography is a high resolution three-dimensional (3D) imaging method with applications in failure analysis and metrology of semiconductor devices. For the smallest logic and memory structures currently in use, it requires single-digit nanometer 3D resolution. In this resolution range, avoiding distortion artifacts in the data becomes crucial. We present examples and discuss ways to reduce the likelihood of such artifacts during the data acquisition, as well as how to mitigate them in post-processing, and therefore increase the data quality.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
