Advances in High-Resolution Non-Destructive Defect Localization Based on Machine Learning Enhanced Signal Processing

Sebastian Brand, Michael Kögel, Christian Grosse, Frank Altmann, Christian Hollerith, Pascal Gounet
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Abstract

Abstract Non-destructive inspection and analysis techniques are crucial for quality assessment and defect analysis in various industries. They enable for screening and monitoring of parts and products without alteration or impact, facilitating the exploration of material interactions and defect formation. With increasing complexity in microelectronic technologies, high reliability, robustness and thus, successful failure analysis is essential. Machine learning (ML) approaches have been developed and evaluated for the analysis of acoustic echo signals and time-resolved thermal responses for assessing their ability for defect detection. In the present paper different ML architectures were evaluated, including 1D and 2D convolutional neural networks (CNNs) after transforming time-domain data into the spectra-land wavelet domains. Results showed that 2D CNN with wavelet domain representation performed best, however at the expense of additional computational effort. Furthermore, ML-based analysis was explored for lock-in thermography to detect and locate defects in the axial dimension based on thermal emissions. While promising, further research is needed to fully realize its potential.
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基于机器学习增强信号处理的高分辨率无损缺陷定位研究进展
摘要无损检测和分析技术是各行业质量评估和缺陷分析的重要手段。它们能够在没有改变或影响的情况下筛选和监测零件和产品,促进对材料相互作用和缺陷形成的探索。随着微电子技术的日益复杂,可靠性、鲁棒性等要求越来越高,成功的故障分析至关重要。机器学习(ML)方法已被开发和评估,用于分析声学回波信号和时间分辨热响应,以评估其缺陷检测能力。本文评估了不同的机器学习架构,包括将时域数据转换为频谱地小波域后的1D和2D卷积神经网络(cnn)。结果表明,采用小波域表示的二维CNN表现最好,但需要额外的计算量。此外,还探索了基于ml的锁定热成像分析,以基于热辐射检测和定位轴向尺寸的缺陷。虽然前景光明,但要充分发挥其潜力,还需要进一步的研究。
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11 weeks
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