{"title":"Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance","authors":"Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa","doi":"10.1002/ecj.12369","DOIUrl":null,"url":null,"abstract":"<p>This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilevertype MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.</p>","PeriodicalId":50539,"journal":{"name":"Electronics and Communications in Japan","volume":"105 3","pages":""},"PeriodicalIF":0.5000,"publicationDate":"2022-08-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electronics and Communications in Japan","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/ecj.12369","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilevertype MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.
期刊介绍：
Electronics and Communications in Japan (ECJ) publishes papers translated from the Transactions of the Institute of Electrical Engineers of Japan 12 times per year as an official journal of the Institute of Electrical Engineers of Japan (IEEJ). ECJ aims to provide world-class researches in highly diverse and sophisticated areas of Electrical and Electronic Engineering as well as in related disciplines with emphasis on electronic circuits, controls and communications. ECJ focuses on the following fields:
- Electronic theory and circuits,
- Control theory,
- Communications,
- Cryptography,
- Biomedical fields,
- Surveillance,
- Robotics,
- Sensors and actuators,
- Micromachines,
- Image analysis and signal analysis,
- New materials.
For works related to the science, technology, and applications of electric power, please refer to the sister journal Electrical Engineering in Japan (EEJ).
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