Structural Сharacteristics, Mechanical Properties, Wear and Oxidation Resistance of Coatings in the Mo–Y–Zr–Si–B System Obtained on Molybdenum by Magnetron Sputtering in the DCMS and HIPIMS Modes

IF 1.1 4区材料科学 Q3 METALLURGY & METALLURGICAL ENGINEERING Protection of Metals and Physical Chemistry of Surfaces Pub Date : 2023-11-24 DOI:10.1134/S2070205123701095

Ph. V. Kiryukhantsev-Korneev, F. I. Chudarin, R. A. Vakhrushev, A. D. Sytchenko, M. I. Karpov, P. Feng, E. A. Levashov

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Abstract—Mo–(Y, Zr)–Si–B coatings were obtained by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS) using composite targets of MoSi₂ + 10% MoB and (MoSi₂ + 10% MoB) + 20% ZrB₂, with the Y segments located in their erosion zone with a total area of 5 and 10 cm². The structure and composition of the coatings were studied by scanning and transmission electron microscopy, glow discharge optical emission spectroscopy, and XRD. The hardness, elastic modulus, elastic recovery, adhesive strength, and resistance of the coatings to abrasive wear and cyclic impact loading were determined. The oxidation resistance and thermal stability were estimated by heating the coatings to a maximum temperature of 1000°C in a muffle furnace and in a transmission electron microscope column, respectively. It has been established that the Mo–Si–B coating contains the h-MoSi₂ phase with preferred orientation in the [110] direction and crystallite size of 75 nm. Alloying of Zr and Y coatings, as well as the transition from DCMS to HIPIMS mode, contributed to the suppression of preferential growth of crystallites, increasing their dispersity and the volume fraction of the amorphous phase, which led to an increase in the crack resistance and adhesive strength of the coatings. The HIPIMS method in coating deposition caused an increase in the hardness and elastic modulus by 10%; resistance to cyclical impact, by 60%; and abrasive resistance, by 20%; it also increased oxidation resistance up to 20%. Mo–Y–Zr–Si–B coatings with the optimal composition demonstrated high thermal stability; the main structural component is the hexagonal phase h-MoSi₂; it remained in the temperature range of 20–1000°C and also resulted in a more than ninefold increased oxidation resistance of the Mo substrate at 1000°C.

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钼基磁控溅射制备Mo-Y-Zr-Si-B体系涂层的结构Сharacteristics、力学性能、磨损和抗氧化性能

摘要:采用MoSi2 + 10% MoB和(MoSi2 + 10% MoB) + 20% ZrB2复合靶材，采用直流磁控溅射(DCMS)和大功率脉冲磁控溅射(HIPIMS)制备了mo - (Y, Zr) - si - b涂层，Y段位于其侵蚀区，总面积分别为5和10 cm2。采用扫描电镜、透射电镜、辉光发射光谱、x射线衍射等研究了涂层的结构和组成。测定了涂层的硬度、弹性模量、弹性回复率、粘接强度、耐磨性和循环冲击载荷。通过在马弗炉和透射电镜柱中分别将涂层加热至最高温度1000°C来评估涂层的抗氧化性和热稳定性。结果表明，Mo-Si-B涂层中含有h-MoSi2相，取向为[110]方向，晶粒尺寸为75 nm。Zr和Y涂层的合金化，以及从DCMS到HIPIMS模式的转变，有助于抑制晶粒的优先生长，增加其分散性和非晶相的体积分数，从而提高涂层的抗裂性和粘接强度。采用HIPIMS方法沉积涂层，使涂层硬度和弹性模量提高10%;抗周期性冲击，提高60%;耐磨性，提高20%;它还增加了高达20%的抗氧化性。优化后的Mo-Y-Zr-Si-B涂层具有较高的热稳定性;主要结构成分为六方相h-MoSi2;在20-1000℃的温度范围内，Mo衬底的抗氧化性提高了9倍以上。

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来源期刊

Protection of Metals and Physical Chemistry of Surfaces 工程技术-冶金工程

CiteScore

1.90

自引率

18.20%

发文量

审稿时长

4-8 weeks

期刊介绍： Protection of Metals and Physical Chemistry of Surfaces is an international peer reviewed journal that publishes articles covering all aspects of the physical chemistry of materials and interfaces in various environments. The journal covers all related problems of modern physical chemistry and materials science, including: physicochemical processes at interfaces; adsorption phenomena; complexing from molecular and supramolecular structures at the interfaces to new substances, materials and coatings; nanoscale and nanostructured materials and coatings, composed and dispersed materials; physicochemical problems of corrosion, degradation and protection; investigation methods for surface and interface systems, processes, structures, materials and coatings. No principe restrictions exist related systems, types of processes, methods of control and study. The journal welcomes conceptual, theoretical, experimental, methodological, instrumental, environmental, and all other possible studies.