Aleksander Brozyniak, Karin Stadlmann, Philipp Kürnsteiner, Heiko Groiss
{"title":"Optimized procedure for conventional TEM sample preparation using birefringence","authors":"Aleksander Brozyniak, Karin Stadlmann, Philipp Kürnsteiner, Heiko Groiss","doi":"10.1016/j.micron.2023.103580","DOIUrl":null,"url":null,"abstract":"<div><p>Specimens for quality transmission electron microscopy (TEM) analyses must fulfil a range of requirements, which demand high precision during the prior preparation process. In this work, an optimized procedure for conventional TEM specimen preparation is presented that exploits the thickness-dependence of interference colors occurring in birefringent materials. It facilitates the correct estimation of specimen thickness to avoid damage or breaking during mechanical thinning and reduces ion-milling times below 30 min. The benefits of the approach are shown on sapphire and silicon carbide cross-section samples. The presented method is equally suitable for assessing specimen thickness during dimpling and wedge-polishing, and is particularly useful at thicknesses below 20 µm, where the accuracy of mechanical techniques is insufficient. It is precise enough to be employed for a visual thickness estimation during the thinning process, but can be additionally optimized by analyzing the RGB spectrum of the occurring interference colors.</p></div>","PeriodicalId":18501,"journal":{"name":"Micron","volume":null,"pages":null},"PeriodicalIF":2.5000,"publicationDate":"2023-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S0968432823001786/pdfft?md5=19fe2318ca594c4e1282ebdbfc6603bf&pid=1-s2.0-S0968432823001786-main.pdf","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micron","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0968432823001786","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MICROSCOPY","Score":null,"Total":0}
引用次数: 0
Abstract
Specimens for quality transmission electron microscopy (TEM) analyses must fulfil a range of requirements, which demand high precision during the prior preparation process. In this work, an optimized procedure for conventional TEM specimen preparation is presented that exploits the thickness-dependence of interference colors occurring in birefringent materials. It facilitates the correct estimation of specimen thickness to avoid damage or breaking during mechanical thinning and reduces ion-milling times below 30 min. The benefits of the approach are shown on sapphire and silicon carbide cross-section samples. The presented method is equally suitable for assessing specimen thickness during dimpling and wedge-polishing, and is particularly useful at thicknesses below 20 µm, where the accuracy of mechanical techniques is insufficient. It is precise enough to be employed for a visual thickness estimation during the thinning process, but can be additionally optimized by analyzing the RGB spectrum of the occurring interference colors.
期刊介绍:
Micron is an interdisciplinary forum for all work that involves new applications of microscopy or where advanced microscopy plays a central role. The journal will publish on the design, methods, application, practice or theory of microscopy and microanalysis, including reports on optical, electron-beam, X-ray microtomography, and scanning-probe systems. It also aims at the regular publication of review papers, short communications, as well as thematic issues on contemporary developments in microscopy and microanalysis. The journal embraces original research in which microscopy has contributed significantly to knowledge in biology, life science, nanoscience and nanotechnology, materials science and engineering.