{"title":"Nanoparticles separation by different conditions at asymmetric flow field- flow fractionation","authors":"C. L. Chiang, C. W. Yeh","doi":"10.1093/jom/ufad036","DOIUrl":null,"url":null,"abstract":"\n As semiconductor manufacturing enters the era of sub-10 nm and 3D stacking, “cleanliness” in the process becomes a crucial factor for process yield. The measurement of nanoparticle concentration, size, and shape in various solutions that may cause contamination during the manufacturing process is currently an important research topic. Although there are various nanoparticle measurement techniques available, further technological development and breakthroughs are still needed for measuring low concentrations and complex mixtures of nanoparticles. Therefore, in this study, we attempted to address the measurement challenges posed by mixed particles by applying Asymmetric Flow Field-Flow Fractionation (AF4) in combination with Dynamic Light Scattering (DLS) and Ultraviolet (UV). The strategy involved separating the samples before measurement. For a nanomixture containing five different sizes of gold nanoparticles (AuNPs) with diameters of 20 nm, 40 nm, 60 nm, 80 nm, and 100 nm, three different methods were employed to control the driving force for particle separation during the elution stage: constant cross flow rate, linearly decreasing cross flow rate, and exponentially decreasing cross flow rate. The results demonstrated that different flow rate control methods indeed yielded variations in nanoparticle separation, with the constant flow rate method showing the best separation efficiency. Additionally, it was observed that the thickness of the experimental chamber played a significant role in affecting the retention time of the nanoparticles during separation.","PeriodicalId":50136,"journal":{"name":"Journal of Mechanics","volume":"5 s1","pages":""},"PeriodicalIF":1.5000,"publicationDate":"2023-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Mechanics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1093/jom/ufad036","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MECHANICS","Score":null,"Total":0}
引用次数: 0
Abstract
As semiconductor manufacturing enters the era of sub-10 nm and 3D stacking, “cleanliness” in the process becomes a crucial factor for process yield. The measurement of nanoparticle concentration, size, and shape in various solutions that may cause contamination during the manufacturing process is currently an important research topic. Although there are various nanoparticle measurement techniques available, further technological development and breakthroughs are still needed for measuring low concentrations and complex mixtures of nanoparticles. Therefore, in this study, we attempted to address the measurement challenges posed by mixed particles by applying Asymmetric Flow Field-Flow Fractionation (AF4) in combination with Dynamic Light Scattering (DLS) and Ultraviolet (UV). The strategy involved separating the samples before measurement. For a nanomixture containing five different sizes of gold nanoparticles (AuNPs) with diameters of 20 nm, 40 nm, 60 nm, 80 nm, and 100 nm, three different methods were employed to control the driving force for particle separation during the elution stage: constant cross flow rate, linearly decreasing cross flow rate, and exponentially decreasing cross flow rate. The results demonstrated that different flow rate control methods indeed yielded variations in nanoparticle separation, with the constant flow rate method showing the best separation efficiency. Additionally, it was observed that the thickness of the experimental chamber played a significant role in affecting the retention time of the nanoparticles during separation.
期刊介绍:
The objective of the Journal of Mechanics is to provide an international forum to foster exchange of ideas among mechanics communities in different parts of world. The Journal of Mechanics publishes original research in all fields of theoretical and applied mechanics. The Journal especially welcomes papers that are related to recent technological advances. The contributions, which may be analytical, experimental or numerical, should be of significance to the progress of mechanics. Papers which are merely illustrations of established principles and procedures will generally not be accepted. Reports that are of technical interest are published as short articles. Review articles are published only by invitation.