{"title":"Numerical simulation analysis of flexible capacitive pressure sensors based on porous pyramidal microstructures","authors":"","doi":"10.1007/s10825-023-02116-7","DOIUrl":null,"url":null,"abstract":"<h3>Abstract</h3> <p>Flexible wearable pressure sensors with high sensitivity have a wide range of applications in the field of healthcare monitoring, e-skin technology, robotic limbs, and other human–machine interaction under low pressures. For very low pressures, a sensor with high sensitivity and bulky, expensive measuring equipment is required to obtain the output signal. The incorporation of a micro-pyramidal porous dielectric section can considerably enhance the sensitivity of the capacitance-based pressure sensor. This article has employed a finite element method-based three-dimensional simulation to assess the performance of the porous microstructured capacitive pressure sensor (pmcps). The numerical results revealed a high level of agreement with the experimental data. To simplify the design and fabrication of the sensor with optimal performance, the effects of parameters such as sensor dielectric constant, dielectric layer porosity, base length, tip width, height, and inter-microstructural spacing of porous micro-pyramids were investigated using the response surface methodology. Sensitivity analysis showed that the tip width of the micro-pyramid has the greatest effect on sensor sensitivity and the least effect on the initial capacitance. Finally, equations were proposed for predicting the initial capacitance and sensor sensitivity based on the geometric parameters of the porous micro-pyramid and intrinsic properties of the dielectric section using three-dimensional finite element simulation to facilitate the ability to predict the fabrication and design process of the pmcps and optimize its performance for different applications.</p>","PeriodicalId":620,"journal":{"name":"Journal of Computational Electronics","volume":null,"pages":null},"PeriodicalIF":2.2000,"publicationDate":"2023-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Computational Electronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s10825-023-02116-7","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Flexible wearable pressure sensors with high sensitivity have a wide range of applications in the field of healthcare monitoring, e-skin technology, robotic limbs, and other human–machine interaction under low pressures. For very low pressures, a sensor with high sensitivity and bulky, expensive measuring equipment is required to obtain the output signal. The incorporation of a micro-pyramidal porous dielectric section can considerably enhance the sensitivity of the capacitance-based pressure sensor. This article has employed a finite element method-based three-dimensional simulation to assess the performance of the porous microstructured capacitive pressure sensor (pmcps). The numerical results revealed a high level of agreement with the experimental data. To simplify the design and fabrication of the sensor with optimal performance, the effects of parameters such as sensor dielectric constant, dielectric layer porosity, base length, tip width, height, and inter-microstructural spacing of porous micro-pyramids were investigated using the response surface methodology. Sensitivity analysis showed that the tip width of the micro-pyramid has the greatest effect on sensor sensitivity and the least effect on the initial capacitance. Finally, equations were proposed for predicting the initial capacitance and sensor sensitivity based on the geometric parameters of the porous micro-pyramid and intrinsic properties of the dielectric section using three-dimensional finite element simulation to facilitate the ability to predict the fabrication and design process of the pmcps and optimize its performance for different applications.
期刊介绍:
he Journal of Computational Electronics brings together research on all aspects of modeling and simulation of modern electronics. This includes optical, electronic, mechanical, and quantum mechanical aspects, as well as research on the underlying mathematical algorithms and computational details. The related areas of energy conversion/storage and of molecular and biological systems, in which the thrust is on the charge transport, electronic, mechanical, and optical properties, are also covered.
In particular, we encourage manuscripts dealing with device simulation; with optical and optoelectronic systems and photonics; with energy storage (e.g. batteries, fuel cells) and harvesting (e.g. photovoltaic), with simulation of circuits, VLSI layout, logic and architecture (based on, for example, CMOS devices, quantum-cellular automata, QBITs, or single-electron transistors); with electromagnetic simulations (such as microwave electronics and components); or with molecular and biological systems. However, in all these cases, the submitted manuscripts should explicitly address the electronic properties of the relevant systems, materials, or devices and/or present novel contributions to the physical models, computational strategies, or numerical algorithms.