{"title":"Comparison of large-volume 3D reconstruction using plasma FIB-SEM and X-ray CT.","authors":"Ryuji Yoshida, Yasutoshi Mizuta, Takeharu Kato, Teiichi Kimura","doi":"10.1093/jmicro/dfae003","DOIUrl":null,"url":null,"abstract":"<p><p>We demonstrated large-volume three-dimensional (3D) reconstruction using plasma-focused ion beam-scanning electron microscopy (PFIB-SEM). We successfully reconstructed a 750 μm (W) × 143 μm (H) × 310 μm (D) volume at a resolution of 200 nm/pix from 1550 SEM backscattered electron images of a Li-ion battery cathode sheet. The PFIB-SEM system was found to be capable of acquiring and reconstructing larger volume 3D datasets than X-ray computed tomography, and with higher resolution and contrast.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"354-357"},"PeriodicalIF":1.9000,"publicationDate":"2024-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy (Oxford, England)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1093/jmicro/dfae003","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrated large-volume three-dimensional (3D) reconstruction using plasma-focused ion beam-scanning electron microscopy (PFIB-SEM). We successfully reconstructed a 750 μm (W) × 143 μm (H) × 310 μm (D) volume at a resolution of 200 nm/pix from 1550 SEM backscattered electron images of a Li-ion battery cathode sheet. The PFIB-SEM system was found to be capable of acquiring and reconstructing larger volume 3D datasets than X-ray computed tomography, and with higher resolution and contrast.
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