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Tribute to peter william hawkes. 向彼得·威廉·霍克斯致敬。
IF 1.9 Pub Date : 2026-02-06 DOI: 10.1093/jmicro/dfaf052
Sameen Ahmed Khan, Ramaswamy Jagannathan
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引用次数: 0
Eric Munro-Pioneer of Electron Optics Software. Eric munro -电子光学软件的先驱。
IF 1.9 Pub Date : 2026-02-06 DOI: 10.1093/jmicro/dfaf051
Rouse John, Rouse Catherine
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引用次数: 0
High-resolution spin-polarized scanning tunneling spectroscopy using a functionalized superconducting tip. 使用功能化超导尖端的高分辨率自旋极化扫描隧道光谱。
IF 1.9 Pub Date : 2026-01-16 DOI: 10.1093/jmicro/dfag001
T Machida

Detecting spin states of electrons at the atomic scale has been at the heart of progress in condensed matter physics. Spin-polarized scanning tunneling microscopy and spectroscopy (SP-STM/STS) has provided important insights into understanding the nature of various spin-dependent phenomena, owing to its capability to visualize energy- and spin-resolved local density-of-states with atomic resolution. This review provides an overview of recent progress in SP-STS using functionalized superconducting tips, focusing on two approaches: conventional superconducting tips and Yu-Shiba-Rusinov (YSR) tips, which are formed by placing a single magnetic atom at the apex of a superconducting tip. Due to their nearly full spin polarization, both types allow for precise detection of the sample's spin polarization. These advanced techniques will be powerful probes for pursuing emergent quantum phenomena that demand ultra-high spin sensitivity, such as the spin polarization of Majorana zero modes around vortex cores in topological superconductors.

在原子尺度上探测电子的自旋状态一直是凝聚态物理学进展的核心。自旋极化扫描隧道显微镜和光谱学(SP-STM/STS)为理解各种自旋相关现象的本质提供了重要的见解,因为它能够以原子分辨率可视化能量和自旋分辨的局域态密度。本文综述了功能化超导针尖在SP-STS中的最新进展,重点介绍了两种方法:常规超导针尖和在超导针尖顶端放置单个磁性原子形成的YSR针尖。由于它们几乎完全的自旋极化,这两种类型都可以精确地检测样品的自旋极化。这些先进的技术将成为探索需要超高自旋灵敏度的新兴量子现象的有力探测器,例如拓扑超导体涡旋核周围马约拉纳零模式的自旋极化。
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引用次数: 0
Angle-resolved Cathodoluminescence Microscopy on Plasmonic Crystals. 等离子体晶体的角度分辨阴极发光显微镜。
IF 1.9 Pub Date : 2026-01-16 DOI: 10.1093/jmicro/dfag002
Hikaru Saito, Takumi Sannomiya

Controlling electromagnetic modes in nanostructures is vital for developing advanced optical devices. Metal surfaces with periodic structures, so-called plasmonic crystals (PlCs) form band structures of surface plasmon polaritons (SPPs), providing highly controllable confinement of SPPs and conversion to far-field light. Angle-resolved cathodoluminescence (CL) spectroscopy, where emitted light upon electron beam irradiation is analyzed with angle selection, can be combined with electron microscopy to visualize eigenmodes at specific wavenumbers. This method allows not only identifying the optical properties of Bloch modes appearing in PlCs, but also accessing functions emerging by local defects introduced into the lattice. This paper reviews applications of angle-resolved CL spectroscopy to mode analysis in one-dimensional and two-dimensional PlCs, and modified structures such as cavities and waveguides. Furthermore, this paper introduces an application of this method to the analysis of enhanced light emission from a phosphor film integrated in a PlC, where emitter-resonator coupling is visualized at the nanoscale.

控制纳米结构中的电磁模式对于开发先进的光学器件至关重要。具有周期性结构的金属表面,即所谓的等离子体晶体(plc)形成表面等离子体激元(SPPs)的能带结构,提供高度可控的SPPs限制和远场光的转换。角分辨阴极发光(CL)光谱学,其中发射的光在电子束照射分析与角度选择,可以与电子显微镜相结合,以可视化在特定波数的特征模式。这种方法不仅可以识别plc中出现的布洛赫模式的光学性质,而且还可以访问由引入晶格的局部缺陷产生的函数。本文综述了角分辨CL光谱在一维和二维plc模式分析中的应用,以及对腔和波导等结构的改进。此外,本文还介绍了将该方法应用于分析集成在PlC中的荧光粉膜的增强光发射,在纳米尺度上显示了发射器-谐振器耦合。
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引用次数: 0
Carrier-mediated reduction mechanism in WO3 nanowires under electron-beam irradiation. 电子束辐照下WO3纳米线中载流子介导的还原机制。
IF 1.9 Pub Date : 2026-01-02 DOI: 10.1093/jmicro/dfaf058
Sho Nekita, Itsuki Misono, Kazuhiro Yasuda, Yusuke Shimada, Chou Jyh-Tyng, Tetsuya Okuyama, Satoshi Hata

Electron-beam irradiation often induces unintended structural and chemical changes in materials. Here, we show that damage and reduction in tungsten trioxide (WO3) nanowires are primarily driven by a carrier-mediated ionization process. In situ electron microscopy and electron energy-loss spectroscopy reveal structural degradation accompanied by the reduction of W6+ to W5+, while carrier dynamics simulations identify persistent, high-density electron-hole populations. Quantitative analyses and control experiments indicate that knock-on displacement and heating contribute minimally. This study establishes a microscopy-based quantitative framework for understanding electron-beam-induced damage and redox processes, highlighting the potential of electron microscopy for mechanistic insights and nanoscale chemical patterning in oxides.

电子束辐照经常引起材料的结构和化学变化。研究表明,三氧化钨(WO3)纳米线的损伤和还原主要是由载流子介导的电离过程驱动的。原位电子显微镜和电子能量损失能谱显示W6+到W5+的结构降解,而载流子动力学模拟发现了持续的高密度电子空穴居群。定量分析和控制实验表明,冲击位移和加热对影响最小。本研究建立了一个基于显微镜的定量框架,用于理解电子束诱导的损伤和氧化还原过程,强调了电子显微镜在氧化物的机制见解和纳米级化学图案方面的潜力。
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引用次数: 0
Valence electron spectroscopy using soft X-ray emission spectroscopy electron microscopes. 使用软x射线发射光谱电子显微镜的价电子能谱。
IF 1.9 Pub Date : 2025-12-27 DOI: 10.1093/jmicro/dfaf057
Masami Terauchi

Compact soft-X-ray emission spectroscopy (SXES) instrument, which was first applied to transmission electron microscope, was recently applied to scanning electron microscope and electron-probe microanalyzer, which improved the practical applicability of SXES as a tool investigating chemical bonding state of elements in bulk materials. Intensity profiles of Al-L, B-K and Si-L emission spectra which directly reflect the partial density of state of valence band (VB) were explained. Those energy positions are affected by core-level shift (chemical shift; CS) and a change of density of state (DOS) of VB, for example a bandgap formation. Those VB DOS measurements combined with electron-beam scanning technique can conduct a chemical bond mapping of a bulk material. It was presented that L-emission spectra of 3d transition-metal elements gives DOS+CS information in Lα,β emission, dielectric information in Lℓ,η, and the number of 3d electrons in the integrated intensity ratio of Lα,β/(Lα,β+ Lℓ,η). Since the electron-beam excited SXES experiment for bulk specimens can control the self-absorption effect, L-absorption profile of 3d-TM elements is obtainable from L-emission measurements by changing the accelerating voltage. Furthermore, CB information can be obtained from SXES spectra of semiconductor materials, Si and diamond cases were presented, by using the self-absorption effect on the background intensity of bremsstrahlung (BS) caused by electron-beam irradiation of the specimen.

紧凑型软x射线发射光谱(SXES)仪器最初应用于透射电子显微镜,最近又应用于扫描电子显微镜和电子探针微量分析仪,提高了SXES作为块状材料中元素化学键态研究工具的实用性。解释了直接反映价带态(VB)偏密度的Al-L、B-K和Si-L发射光谱的强度分布。这些能量位置受到核心层位移(化学位移;CS)和VB的态密度变化(DOS)的影响,例如形成带隙。这些VB DOS测量与电子束扫描技术相结合,可以对块状材料进行化学键映射。三维过渡金属元素的L-发射光谱给出了Lα、β发射中的DOS+CS信息,Lα、η中的介电信息,以及Lα、β/(Lα,β+ Lα、η)积分强度比中的三维电子数。由于块状试样的电子束激发SXES实验可以控制自吸收效应,因此通过改变加速电压,可以从l发射测量中获得3d-TM元素的l吸收曲线。此外,利用电子束辐照引起的轫致辐射(BS)背景强度的自吸收效应,可以从半导体材料的SXES光谱中获得CB信息。
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引用次数: 0
Semi-supervised semantic segmentation of SEM images considering multi-scale structural consistency loss in semiconductor pattern layouts. 考虑半导体模式布局中多尺度结构一致性损失的SEM图像半监督语义分割。
IF 1.9 Pub Date : 2025-12-26 DOI: 10.1093/jmicro/dfaf056
Akira Ito, Atsushi Miyamoto

In the fabrication of semiconductor devices, increased yield is achieved using Scanning Electron Microscopes (SEM) to measure and inspect circuit patterns. With recent decreasing scale and increasing complexity of semiconductor circuit patterns, it has become increasingly difficult to recognize patterns accurately using rule-based image processing methods. As such, we propose a method that uses semi-supervised learning for segmentation processing, to recognize which pattern level each pixel represents. With existing methods, the pseudo-labels used for training were not accurate enough, and there were issues such as inconsistent recognition of repeated-pattern layouts and mixed-up results in large unmarked areas distant from the pattern contour. Accordingly, the proposed method is able to perform highly accurate segmentation with the design of new types of loss for evaluating consistency in pattern structure at various scales. When compared with Unimatch and CAC, which are well-known high-performance segmentation methods, the accuracy relative to visual identification increased dramatically, from 10-12% to 100%. In quantitative evaluation using mean Intersection-over-Union (mIoU) at the pixel level, mean values also increased from a range between 0.45 and 0.65 to over 0.94, confirming that the proposed method is effective.

在半导体器件的制造中,使用扫描电子显微镜(SEM)来测量和检查电路模式可以提高产量。随着半导体电路图形规模的不断缩小和复杂度的不断增加,使用基于规则的图像处理方法来准确识别图形变得越来越困难。因此,我们提出了一种使用半监督学习进行分割处理的方法,以识别每个像素所代表的模式级别。现有方法用于训练的伪标签不够准确,在距离图案轮廓较远的大面积无标记区域存在重复图案布局识别不一致、结果混淆等问题。因此,该方法可以通过设计新的损失类型来评估不同尺度下图案结构的一致性,从而实现高精度的分割。与Unimatch和CAC这两种众所周知的高性能分割方法相比,相对于视觉识别的准确率从10-12%显著提高到100%。在像元水平上使用平均交联(Intersection-over-Union, mIoU)进行定量评价时,均值也从0.45 ~ 0.65增加到0.94以上,证实了所提方法的有效性。
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引用次数: 0
EELS of phonons: polarity and temperature dependence. 声子的EELS:极性和温度依赖性。
IF 1.9 Pub Date : 2025-12-19 DOI: 10.1093/jmicro/dfaf055
Jun Kikkawa

This paper provides an overview of phonon measurement using electron energy loss spectroscopy (EELS) in the electron microscope, with polar cubic boron nitride (c-BN) and nonpolar diamond crystals as representative examples. Differential scattering cross-sections for phonon creation and annihilation are reviewed, highlighting the influence of crystal polarity under kinematical and dynamical scattering conditions. The temperature dependence of EELS intensity is examined, with local absolute temperature evaluated by analysing the ratio of phonon annihilation to creation intensities. Practical aspects and challenges associated with phonon measurement in EELS are also discussed, together with future perspectives in this evolving field.

本文以极性立方氮化硼(c-BN)和非极性金刚石晶体为代表,综述了电子能量损失谱(EELS)在电子显微镜下的声子测量方法。回顾了声子产生和湮灭的微分散射截面,重点介绍了晶体极性在运动学和动力学散射条件下的影响。研究了EELS强度的温度依赖性,通过分析声子湮灭与产生强度的比值来评估局部绝对温度。在EELS声子测量相关的实际方面和挑战也进行了讨论,以及在这个不断发展的领域的未来前景。
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引用次数: 0
Development of a Wire Corrector for Low Accelerating Voltage Scanning Electron Microscopy. 低加速电压扫描电镜用导线校正器的研制。
IF 1.9 Pub Date : 2025-12-18 DOI: 10.1093/jmicro/dfaf054
Tomonori Nakano, Yu Yamazawa

Aberration correctors are essential for achieving high-resolution imaging in advanced electron microscopy. However, their complexity and cost have limited their integration into conventional scanning electron microscopes (SEMs), particularly in low-voltage applications. In this study, we present a wire aberration corrector that utilizes symmetrically arranged current lines to generate multipole fields. The corrector was implemented in a cold field emission SEM equipped with a bright-field STEM detector and operated at 30 kV. Experimental results demonstrate successful generation of quadrupole to dodecapole fields, effective correction of spherical aberration, and improved imaging of carbon multilayers. These findings demonstrate that wire correctors offer a compact and cost-effective means to enhance imaging performance in standard SEM systems, and the underlying principle could be adapted for other electron microscopy platforms such as TEM or STEM.

像差校正器是必不可少的实现高分辨率成像在先进的电子显微镜。然而,它们的复杂性和成本限制了它们与传统扫描电子显微镜(sem)的集成,特别是在低压应用中。在这项研究中,我们提出了一种利用对称排列的电流线来产生多极场的线像差校正器。校正器安装在配有亮场STEM探测器的冷场发射SEM中,工作电压为30 kV。实验结果表明,四极到十二极磁场的成功产生,有效地校正了球差,提高了碳多层膜的成像效果。这些发现表明,导线校正器提供了一种紧凑且具有成本效益的方法来提高标准SEM系统的成像性能,其基本原理可以适用于其他电子显微镜平台,如TEM或STEM。
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引用次数: 0
Radiation-induced short-range order in ceramics. 陶瓷中辐射诱发的短程有序。
IF 1.9 Pub Date : 2025-12-02 DOI: 10.1093/jmicro/dfaf053
Manabu Ishimaru

The development of radiation tolerant materials is of technological importance for establishing safe operating systems in the nuclear industry, from power generation to the immobilization of high-level radioactive waste. Harsh radiation environments generate interstitials and vacancies in materials, and their accumulation leads to structural changes, including order-to-disorder phase transformations and amorphization. These structural changes are induced locally on an atomic scale; therefore, transmission electron microscopy is a useful technique for analyzing radiation effects in materials. In addition, the strong interaction between matter and electrons enables the detection of weak signals associated with phase transformations, such as diffuse scattering and halo rings. This article provides an overview of radiation-induced amorphous structures in materials consisting of light elements, such as boron carbide and silicon oxycarbide, as well as the short-range ordered structure that appears during an order-to-disorder phase transformation in fluorite structural derivatives.

开发耐辐射材料对于建立核工业从发电到高放射性废物固定化的安全操作系统具有重要的技术意义。恶劣的辐射环境会在材料中产生间隙和空位,它们的积累会导致结构变化,包括有序到无序的相变和非晶化。这些结构变化是在局部原子尺度上引起的;因此,透射电子显微镜是分析材料辐射效应的一种有用的技术。此外,物质和电子之间的强相互作用使得检测与相变相关的弱信号成为可能,例如漫射散射和晕环。本文概述了由轻元素(如碳化硼和碳化氧硅)组成的材料中辐射诱导的非晶态结构,以及萤石结构衍生物在有序到无序相变过程中出现的短程有序结构。
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引用次数: 0
期刊
Microscopy (Oxford, England)
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