Design and Analyze the Effect of Hetero Material and Dielectric on TFET with Dual Work Function Engineering

P. Vimala, T. Samuel
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Abstract

As the size of the field effect transistors is reduced down to nanometers, the performance of the devices is affected by various short-channel effects. To overcome these effects, various novel devices are used. Tunnel Field Effect Transistors (TFET) are novel devices in which the drain current needs to be improved. Gate engineering and III-V compound materials are proposed to improve the ON current and reduce the leakage current along with its ambipolar behaviour. As the MOSFET or FinFET devices are scaled below the nanometer regime, unwanted effects like leakage current play a vital role rather than driving current improvement. Conventional MOS transistors have optimized the leakage current by limiting the sub-threshold swing of 60mv/dec. To overcome this limitation, Tunnel Field Effect Transistors (TFET) is considered as the best alternative device for low power applications. The proposed device structure is designed with a heterojunction hetero dielectric dual material gate Tunnel Field Effect Transistor incorporating various combinations of III-V compound materials such as AlGaAsSb/InGaAs, InGaAs/Ge, InGaAs/InP and SiGe/Si. As in III-V composite materials like AlGaAsSb/InGaAs, the narrower bandgap at the source channel interface helps to improve the electric field across the junction. At the same time, the wider bandgap at the channel drain junction leads to unidirectional current flow, resulting in ambipolar reduction. 2D TCAD simulation is used to obtain the electrical parameters for Hetero junction TFETs and the comparison analysis of different Hetero device structures. Many researchers have introduced different heterostructures, but research papers related to dual material heterostructure TFET performance are not available compared with different III–V compound materials combinations. In this paper, performance analysis of the dual material hetero TFET structure for different III–V compound materials combinations such as AlGaAsSb/InGaAs, InGaAs/Ge, InGaAs/InP and SiGe/Si is investigated. The device's electrical parameters, such as energy band diagram, current density, electric field, drain current, gate capacitance and transconductance, have been simulated and analyzed. Besides, the dual material used in the gate, such as Metal1 (M1) and Metal2 (M2), along with HfO2/SiO2 stacked dielectric, helps improve the gate controllability over the channel and the leakage current reduction. The 2D TCAD simulation is used to analyze the electrical parameters of Hetero junction TFETs. The comparison analysis of different Hetero device structure is shown in this section. All the device simulation is carried out using Fermi Dirac carrier statistics model, Lombardi CVT mobility model, Shockley-Read-Hall recombination model, non-local band to band tunneling model, Drift Diffusion current transport model and band gap narrowing model for higher concentration of electron and hole plasma at drain and source side. The parallel stacked dielectrics Al2O3 and HfO2 are used in the simulation which allows the increased gate capacitance. An ION=10-1A/μm, IOFF = 10-12A/μm at drive voltage 0.5V is obtained for InGaAs/InP layer at the source channel hetero junction TFET, and ION=10-2A/μm, IOFF =10-14A/μm at drive voltage 0.5V is obtained for SiGe/Si layer at the source channel hetero junction TFET. Therefore, the InGaAs/InP and SiGe/Si layer TFET are more suitable for ultra-low power integrated circuits.
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设计和分析异性材料和介电质对具有双工作函数工程的 TFET 的影响
随着场效应晶体管的尺寸缩小到纳米级,器件的性能受到各种短沟道效应的影响。为了克服这些效应,人们使用了各种新型器件。隧道场效应晶体管 (TFET) 是一种新型器件,其漏极电流需要改进。由于 MOSFET 或 FinFET 器件的尺寸小于纳米级,漏电流等不必要的效应比驱动电流的改善起着至关重要的作用。传统的 MOS 晶体管通过限制 60mv/dec 的阈下摆动来优化漏电流。为了克服这一限制,隧道场效应晶体管(TFET)被认为是低功耗应用的最佳替代器件。所提出的器件结构设计采用了异质结异质电介质双材料门隧道场效应晶体管,并结合了各种 III-V 复合材料组合,如 AlGaAsSb/InGaAs、InGaAs/Ge、InGaAs/InP 和 SiGe/Si。在 AlGaAsSb/InGaAs 等 III-V 族化合物材料中,源沟道界面上较窄的带隙有助于改善整个结的电场。与此同时,沟道应变结处较宽的带隙会导致电流单向流动,从而降低伏极性。许多研究人员推出了不同的异质结构,但与不同 III-V 复合材料组合相比,有关双材料异质结构 TFET 性能的研究论文还不多。本文研究了 AlGaAsSb/InGaAs、InGaAs/Ge、InGaAs/InP 和 SiGe/Si 等不同 III-V 化合物材料组合的双材料异质 TFET 结构的性能分析,并模拟和分析了器件的能带图、电流密度、电场、漏电流、栅极电容和跨导等电学参数。此外,栅极使用的双材料,如金属 1(M1)和金属 2(M2),以及 HfO2/SiO2 叠层电介质,有助于提高栅极对沟道的可控性和降低漏电流。本节显示了不同异质器件结构的对比分析。所有器件仿真均采用费米-狄拉克载流子统计模型、伦巴第 CVT 迁移率模型、肖克利-雷德-霍尔重组模型、非局部带间隧道模型、漂移扩散电流传输模型以及漏极和源极侧较高电子和空穴等离子浓度的带隙缩小模型。源极沟道异质结 TFET 的 InGaAs/InPlayer 在驱动电压为 0.5V 时的 ION=10-1A/μm, IOFF = 10-12A/μm;源极沟道异质结 TFET 的 SiGe/Si 层在驱动电压为 0.5V 时的 ION=10-2A/μm, IOFF =10-14A/μm。因此,InGaAs/InP 和 SiGe/Si 层 TFET 更适合用于超低功耗集成电路。
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