José-Miguel Zarate-Reyes, Erick Flores-Romero, Luis Rodríguez-Fernández, Yuriy Kudriavtsev, Juan-Carlos Cheang-Wong
{"title":"Formation of optical planar waveguides on fused quartz by MeV ion implantation","authors":"José-Miguel Zarate-Reyes, Erick Flores-Romero, Luis Rodríguez-Fernández, Yuriy Kudriavtsev, Juan-Carlos Cheang-Wong","doi":"10.1049/ote2.12114","DOIUrl":null,"url":null,"abstract":"<p>The optical losses and the refractive index change of optical planar waveguides formed by MeV ion implantation were correlated with the experimental ion implantation parameters. Direct ion implantation was performed by means of carbon, silicon and copper ion beams impinging on the substrate surface at normal incidence. The ions were accelerated at energies ranging from 3 to 12 MeV with fluences varying from 1 × 10<sup>12</sup> to 2 × 10<sup>16</sup> ion/cm<sup>2</sup>, according to the type of implanted ion. The modification of the substrate refractive index due to the ion irradiation-induced damage was evaluated using the prism coupler method, and the refractive index profiles were determined by means of a reconstruction method using a multilayer structure approximation. The guiding properties of the waveguides were analysed using the fibre-coupling technique to determine both the optical transmission and transversal modes at 635 nm. The main practical relevance of our research is the obtention of high-quality waveguides at low current density MeV ion implantation (≤80 nA/cm<sup>2</sup>) without post-implantation annealing.</p>","PeriodicalId":13408,"journal":{"name":"Iet Optoelectronics","volume":"18 1-2","pages":"32-40"},"PeriodicalIF":2.3000,"publicationDate":"2024-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1049/ote2.12114","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Iet Optoelectronics","FirstCategoryId":"94","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1049/ote2.12114","RegionNum":4,"RegionCategory":"计算机科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
The optical losses and the refractive index change of optical planar waveguides formed by MeV ion implantation were correlated with the experimental ion implantation parameters. Direct ion implantation was performed by means of carbon, silicon and copper ion beams impinging on the substrate surface at normal incidence. The ions were accelerated at energies ranging from 3 to 12 MeV with fluences varying from 1 × 1012 to 2 × 1016 ion/cm2, according to the type of implanted ion. The modification of the substrate refractive index due to the ion irradiation-induced damage was evaluated using the prism coupler method, and the refractive index profiles were determined by means of a reconstruction method using a multilayer structure approximation. The guiding properties of the waveguides were analysed using the fibre-coupling technique to determine both the optical transmission and transversal modes at 635 nm. The main practical relevance of our research is the obtention of high-quality waveguides at low current density MeV ion implantation (≤80 nA/cm2) without post-implantation annealing.
期刊介绍:
IET Optoelectronics publishes state of the art research papers in the field of optoelectronics and photonics. The topics that are covered by the journal include optical and optoelectronic materials, nanophotonics, metamaterials and photonic crystals, light sources (e.g. LEDs, lasers and devices for lighting), optical modulation and multiplexing, optical fibres, cables and connectors, optical amplifiers, photodetectors and optical receivers, photonic integrated circuits, photonic systems, optical signal processing and holography and displays.
Most of the papers published describe original research from universities and industrial and government laboratories. However correspondence suggesting review papers and tutorials is welcomed, as are suggestions for special issues.
IET Optoelectronics covers but is not limited to the following topics:
Optical and optoelectronic materials
Light sources, including LEDs, lasers and devices for lighting
Optical modulation and multiplexing
Optical fibres, cables and connectors
Optical amplifiers
Photodetectors and optical receivers
Photonic integrated circuits
Nanophotonics and photonic crystals
Optical signal processing
Holography
Displays