Yuwei Guo, Simei Zeng, Qi Liu, Jingye Sun, Mingqiang Zhu, Linan Li, Tao Deng
{"title":"Review of the pressure sensor based on graphene and its derivatives","authors":"Yuwei Guo, Simei Zeng, Qi Liu, Jingye Sun, Mingqiang Zhu, Linan Li, Tao Deng","doi":"10.1016/j.mee.2024.112167","DOIUrl":null,"url":null,"abstract":"<div><p>Pressure sensors are widely used in a variety of industrial automatic control environments and in everyday life, including production automatic control, aerospace, healthcare, electronic skin and many other industries. Different structural designs are suitable for different application scenarios. With the development of technology, the demand for high sensitivity and wide range pressure sensors is increasing. The appearance of graphene-based materials has pushed the performance of pressure sensors to new heights. In this paper, the research progress of pressure sensors in the past ten years based on graphene and its derivatives is deeply discussed. According to the classification of application directions based on different substrate structures, the current pressure sensors based on graphene and its derivatives are reviewed. Finally, the current development status of pressure sensing technology based on graphene and its derivatives is summarized, and the development prospect in this field is prospected.</p><p>Index Terms.</p><p>Pressure sensor, Graphene, Graphene derivatives.</p></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":null,"pages":null},"PeriodicalIF":2.6000,"publicationDate":"2024-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931724000364","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Pressure sensors are widely used in a variety of industrial automatic control environments and in everyday life, including production automatic control, aerospace, healthcare, electronic skin and many other industries. Different structural designs are suitable for different application scenarios. With the development of technology, the demand for high sensitivity and wide range pressure sensors is increasing. The appearance of graphene-based materials has pushed the performance of pressure sensors to new heights. In this paper, the research progress of pressure sensors in the past ten years based on graphene and its derivatives is deeply discussed. According to the classification of application directions based on different substrate structures, the current pressure sensors based on graphene and its derivatives are reviewed. Finally, the current development status of pressure sensing technology based on graphene and its derivatives is summarized, and the development prospect in this field is prospected.
期刊介绍：
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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