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Evaluation of the robustness of the defect-centric model for defect parameter extraction from RTN and BTI analysis using Comphy 缺陷中心模型在RTN和BTI分析中缺陷参数提取的鲁棒性评价
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-05 DOI: 10.1016/j.mee.2025.112436
Martin E.M. Loesener , Tobias Zinsler , Bernhard Stampfer , Florian Wimmer , Eleftherios Ioannidis , Walter Pflanzl , Rainer Minixhofer , Tibor Grasser , Michael Waltl
Advanced reliability simulators like Comphy capture much of the state-of-the-art modeling behind charge trapping processes. An alternative approach to Comphy is to apply stochastic models, e.g. the defect-centric model, directly to the experimental data to extract the impact of defects on the device behavior and trap densities. In order to efficiently design defect characterization experiments, however, it is of utmost importance to understand the robustness of the defect-centric model under a variety of pre-conditions. In this work, we evaluate the requirements to employ the defect-centric model for data analysis, using simulated data from Comphy based on a real 400 nm × 180 nm pMOS device. Our results show that the number of devices from wafer-level tests does not suffice for statistical evaluation of RTN analysis. Here, preferably array chips should be used. For BTI studies, both wafer-level and array-chip tests enable us to extract good estimates for defect parameters with little computational effort.
像Comphy这样的高级可靠性模拟器可以捕获电荷捕获过程背后的许多最先进的模型。Comphy的另一种方法是将随机模型(例如以缺陷为中心的模型)直接应用于实验数据,以提取缺陷对器件行为和陷阱密度的影响。然而,为了有效地设计缺陷表征实验,了解以缺陷为中心的模型在各种前提条件下的鲁棒性至关重要。在这项工作中,我们评估了采用以缺陷为中心的模型进行数据分析的需求,使用了基于真实400 nm × 180 nm pMOS器件的Comphy模拟数据。我们的研究结果表明,晶圆级测试的器件数量不足以对RTN分析进行统计评估。在这里,最好使用阵列芯片。对于BTI研究,晶圆级和阵列芯片测试都使我们能够以很少的计算量提取出良好的缺陷参数估计。
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引用次数: 0
A DC − 24 GHz SPDT switch design in 22 nm FD-SOI CMOS for 5G FR1 and FR3 bands 基于22 nm FD-SOI CMOS的5G FR1和FR3频段DC - 24 GHz SPDT开关设计
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-29 DOI: 10.1016/j.mee.2025.112428
F. Silva , L.-W. Ouyang , D.Y.C. Lie , C. Sweeney , J. Lopez
A fully-monolithic DC - 24 GHz SPDT (single-pole-double-throw) RF (radio-frequency) switch IC (integrated circuit) is designed and taped out in a 22 nm FD-SOI (fully-depleted silicon-on-insulator) CMOS process, targeting 5G FR1 and FR3 band applications. The first-generation switch (SW1) has measured insertion loss of about 1.9/2.8/3.8 dB at 10/18/24 GHz, reasonably close to the simulation data within 0.5 dB, and measured receive-antenna (RX-ANT) isolation of around 28.2/23.2/20.7 dB at 10/18/24 GHz. However, we found both the post-layout parasitic (PEX) RCC simulations (accounting for resistance, capacitance, and coupling capacitance) and the EM (electromagnetic) simulations underestimated the switch's insertion loss compared with measurement data, especially at frequencies above 30 GHz. To reduce this loss and to design a switch that may operate at the higher frequency FR2 band (i.e., 24.25–52.6 GHz), a second-generation switch (SW2) with improved transistor sizing and a matching network is proposed. PEX-RCC simulations indicate that the SW2 may reduce the insertion loss by up to ∼1 dB at 24 GHz vs. SW1, while maintaining the TX-RX isolation above 30 dB.
针对5G FR1和FR3频段应用,设计了全单片DC - 24 GHz SPDT(单极双掷)RF(射频)开关IC(集成电路),并采用22 nm FD-SOI(完全耗尽绝缘体上硅)CMOS工艺进行封装。第一代交换机(SW1)在10/18/24 GHz时测量到的插入损耗约为1.9/2.8/3.8 dB,与仿真数据在0.5 dB内相当接近,在10/18/24 GHz时测量到的接收天线(RX-ANT)隔离度约为28.2/23.2/20.7 dB。然而,我们发现,与测量数据相比,布局后寄生(PEX) RCC模拟(考虑电阻、电容和耦合电容)和EM(电磁)模拟都低估了开关的插入损耗,特别是在频率高于30 GHz时。为了减少这种损耗并设计一种可以在更高频率FR2频段(即24.25-52.6 GHz)工作的开关,提出了具有改进晶体管尺寸和匹配网络的第二代开关(SW2)。PEX-RCC仿真表明,与SW1相比,SW2在24 GHz时可将插入损耗降低高达1 dB,同时保持TX-RX隔离度在30 dB以上。
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引用次数: 0
Research on evaluation method of data retention capability of STT-MRAM chips STT-MRAM芯片数据保留能力评估方法研究
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-25 DOI: 10.1016/j.mee.2025.112427
Jiejie Sun , Meining Ji , Hongguang Shen , Chuanpeng Jiang , Chao Wang , Meng Zhang , Kaihua Cao , Bi Wang , Haibo Ye
Data retention time, a crucial reliability parameter in spin-transfer torque magnetic random access memory (STT-MRAM), characterizes the capability to maintain stable data storage time. Methods for evaluating data retention time often face the issues of excessive test time and limited precision. This study investigates the data retention capability of STT-MRAM chips by using high-temperature acceleration and magnetic-field acceleration methods, which significantly enhance both testing efficiency and accuracy. The two acceleration methods show high consistency in predicting EBmeff and Δeff, with a relative deviation of only 10 % at −25 °C. Furthermore, the observed dependence of EBeff on the magnetic field aligns well with theoretical predictions derived from the domain wall model. Experimental results show that STT-MRAM chips can achieve a data retention time exceeding 20 years at 105 °C, fulfilling the stringent reliability criteria required for industrial-grade memory applications. These findings provide critical experimental verification and technical insights to support the integration of STT-MRAM into next-generation memory architectures.
数据保持时间是自旋传递转矩磁随机存储器(STT-MRAM)可靠性的关键参数,它表征了数据保持稳定存储时间的能力。评估数据保留时间的方法经常面临测试时间过长和精度有限的问题。本研究采用高温加速和磁场加速两种方法对STT-MRAM芯片的数据保留能力进行了研究,显著提高了测试效率和准确性。两种加速方法在预测EBmeff和Δeff时具有较高的一致性,在- 25°C时相对偏差仅为10%。此外,观测到的EBeff对磁场的依赖性与从畴壁模型得出的理论预测很好地吻合。实验结果表明,STT-MRAM芯片可以在105°C下实现超过20年的数据保留时间,满足工业级存储器应用所需的严格可靠性标准。这些发现为支持STT-MRAM集成到下一代存储器架构中提供了关键的实验验证和技术见解。
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引用次数: 0
Asynchronous real-time learning in Spiking Neural Network using 3-terminal Resistance Random Access Memory 基于3端电阻随机存取存储器的脉冲神经网络异步实时学习
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1016/j.mee.2025.112429
Harshvardhan Singh , Nirmal Solanki , Jaskirat Singh Maskeen , Shalu Saini , Madhav Pathak , Sandip Lashkare
Spiking Neural Networks (SNNs) inspired by the human brain are promising alternative to solve real-life complex problems, such as pattern recognition at low energy consumption. A key approach to implementing SNNs involves using a Resistance Random Access Memory (RRAM) crossbar array to simulate synaptic weights, which can have multi-step resistance states suitable for processing analog signals. However, a major hurdle with traditional 2-terminal RRAMs is the “read–write dilemma”: the low voltage needed for a non-destructive read operation conflicts with the high voltage required for a write operation, making simultaneous, real-time learning challenging. Current solutions to this problem, such as time or frequency division multiplexing and separate read/write arrays, increase the circuit’s complexity, size, or operation time. This paper proposes a novel solution using a recently developed 3-terminal (3T) Pr0.7Ca0.3MnO3 (PCMO) RRAM. By using two terminals for writing and a third, dedicated decoupled terminal for reading, this architecture allows for simultaneous and asynchronous read and write operations. This approach resolves the read–write conflict inherent in 2-terminal designs, enabling real-time learning in SNNs without significant increase in circuit overhead and learning time.
受人脑启发的脉冲神经网络(SNNs)有望解决现实生活中的复杂问题,如低能耗模式识别。实现snn的一个关键方法是使用电阻随机存取存储器(RRAM)交叉棒阵列来模拟突触权重,它可以具有适合处理模拟信号的多步电阻状态。然而,传统的2端rram的一个主要障碍是“读写困境”:非破坏性读取操作所需的低电压与写入操作所需的高电压相冲突,这使得同步、实时学习变得困难。目前解决这个问题的方案,如时分或频分复用和单独的读/写阵列,增加了电路的复杂性、尺寸或操作时间。本文提出了一种新的解决方案,使用最新开发的3端(3T) Pr0.7Ca0.3MnO3 (PCMO) RRAM。通过使用两个终端进行写入,使用第三个专用的解耦终端进行读取,这种体系结构允许同时和异步读写操作。这种方法解决了双端设计中固有的读写冲突,在不显著增加电路开销和学习时间的情况下实现了snn的实时学习。
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引用次数: 0
Simulation of SAF-enhanced multilayered STT-MRAM structures saf增强多层STT-MRAM结构的仿真
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-06 DOI: 10.1016/j.mee.2025.112426
M. Bendra , W. Goes , S. Selberherr , V. Sverdlov
The reliability of multilayered spin-transfer torque magnetoresistive random access memory with synthetic antiferromagnets is crucial for computing-in-memory architectures, high-performance computing, and high-density storage applications. This study investigates the role of interlayer exchange coupling in magnetic tunnel junction structures, which are fundamental to spin-transfer torque magnetoresistive random access memory performance and stability. We analyze how interlayer exchange coupling influences magnetic stability and spin-transfer torque switching efficiency using finite element method simulations combined with the Landau–Lifshitz–Gilbert equation. Our findings reveal that optimizing interlayer exchange coupling not only enhances data retention and write/read speeds but also mitigates miniaturization challenges and improves device reliability in downscaled spin-transfer torque magnetoresistive random access memory technologies. The results further emphasize the strong dependence of interlayer exchange coupling on spacer properties, which dictate magnetic orientations and coupling energy, offering a strategic pathway to engineer more efficient and robust spin-transfer torque magnetoresistive random access memory devices. This work highlights the critical impact of magnetic coupling on the switching dynamics and long-term stability of spintronic memory, providing insights that pave the way for next-generation, high-performance memory solutions.
合成反铁磁体多层自旋转移转矩磁阻随机存取存储器的可靠性对于内存计算体系结构、高性能计算和高密度存储应用至关重要。本研究探讨了层间交换耦合在磁隧道结结构中的作用,这是自旋传递转矩磁阻随机存取存储器性能和稳定性的基础。利用有限元模拟方法结合Landau-Lifshitz-Gilbert方程分析了层间交换耦合对磁稳定性和自旋传递转矩转换效率的影响。我们的研究结果表明,优化层间交换耦合不仅可以提高数据保留和写入/读取速度,还可以减轻小型化挑战,提高小尺寸自旋转移转矩磁阻随机存取存储器技术的设备可靠性。研究结果进一步强调了层间交换耦合对间隔层性质的强烈依赖,间隔层性质决定了磁取向和耦合能,为设计更高效、更稳健的自旋转移转矩磁阻随机存取存储器器件提供了一条战略途径。这项工作强调了磁耦合对自旋电子存储器的开关动力学和长期稳定性的关键影响,为下一代高性能存储器解决方案铺平了道路。
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引用次数: 0
Vialess non-spiral on-chip stacked transformer on high-resistivity silicon for improved RF power transfer efficiency 高电阻率硅片上无孔非螺旋堆叠变压器,提高射频功率传输效率
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-04 DOI: 10.1016/j.mee.2025.112424
Najeh Zeidi , Farès Tounsi , Jean-Pierre Raskin , Denis Flandre
On-chip transformers are fundamental components in integrated circuits, serving key functions such as impedance matching, signal coupling, voltage conversion, and galvanic isolation in high-frequency and mixed-signal systems. However, their performance is often limited by factors like substrate losses, interwinding capacitance, and series resistance, which reduce both bandwidth and efficiency. This paper presents a novel non-spiral, vialess stacked on-chip transformer featuring a compact 620 μm × 620 μm footprint, utilizing only two metal layers to achieve enhanced high-frequency power transfer efficiency. Key performance metrics, such as quality factor (Q), coupling coefficient (Kim), self-resonant frequency, and maximum power transfer efficiency, are compared against those of interleaved and interwinding transformers, all under identical geometric constraints, using both experimental measurements and electromagnetic simulations. All devices were fabricated on a high-resistivity silicon substrate with a trap-rich layer (HR-Si + TR), providing a quasi-insulated platform that significantly reduces substrate losses. Despite the interwinding transformer achieving the highest coupling coefficient (Kim = 0.96) and the interleaved transformer showing superior Q-factors (Q1 = Q2 = 5.7), the proposed non-spiral stacked design demonstrates the larger peak power transfer efficiency of 0.72 at 2.5 GHz, outperforming the interleaved (0.60 at 2.66 GHz) and interwinding (0.45 at 0.90 GHz) configurations. Moreover, the design maintains this performance superiority even on standard low-resistivity silicon, confirming its robustness and suitability for passive RF integration in CMOS-compatible processes. This efficiency enhancement stems from an exceptionally low mutual resistive coupling, achieved through strong vertical magnetic linkage and reduced series resistance in parallel conductor paths.
片上变压器是集成电路中的基本部件,在高频和混合信号系统中具有阻抗匹配、信号耦合、电压转换和电流隔离等关键功能。然而,它们的性能通常受到衬底损耗、绕线电容和串联电阻等因素的限制,从而降低了带宽和效率。本文提出了一种新型的非螺旋、无孔堆叠片上变压器,其尺寸为620 μm × 620 μm,仅利用两层金属层来提高高频功率传输效率。关键性能指标,如质量因子(Q),耦合系数(Kim),自谐振频率和最大功率传输效率,与那些交错和交错变压器进行比较,所有在相同的几何约束下,使用实验测量和电磁模拟。所有器件都是在高电阻率硅衬底上制造的,衬底上有一个富阱层(HR-Si + TR),提供了一个准绝缘平台,显著降低了衬底损耗。尽管交错变压器实现了最高的耦合系数(Kim = 0.96),交错变压器显示出优越的q因子(Q1 = Q2 = 5.7),但所提出的非螺旋堆叠设计显示出更高的峰值功率传输效率,在2.5 GHz时为0.72,优于交错(2.66 GHz时为0.60)和交错(0.45)配置。此外,该设计即使在标准低电阻率硅上也保持了这种性能优势,证实了其稳健性和对cmos兼容工艺中无源射频集成的适用性。这种效率的提高源于极低的互阻耦合,通过强大的垂直磁连接和减少并联导体路径中的串联电阻来实现。
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引用次数: 0
Extensive FPGA and ASIC resource comparison for blind I/Q imbalance estimators and compensators 广泛的FPGA和ASIC资源比较盲I/Q不平衡估计器和补偿器
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-03 DOI: 10.1016/j.mee.2025.112421
Moritz Tockner , Moritz Stockinger , Oliver Lang , Andreas Meingassner , Mario Huemer
In wireless communications, in-phase (I) and quadrature-phase (Q) imbalance is a well-understood issue, and an extensive body of different I/Q imbalance estimation and compensation algorithms exists in the literature. Many of these algorithms, including those in this work, focus on mitigating I/Q imbalance on the receiver side. We consider frequency-independent (FID) estimators that operate as so-called blind algorithms, where little to no knowledge about the transmitted data is required. However, little effort has been made to compare the required resources for implementing these algorithms in hardware. In this work, we compare a comprehensive list of such algorithms with regard to their logic utilization, required registers, and embedded multipliers when implementing them on a field-programmable gate array (FPGA). Subsequently, we provide synthesis results based on the SkyWater 130 nm open-source process design kit (PDK), which enables comparisons of the required chip areas for the corresponding application-specific integrated circuit (ASIC) designs. We optimize the fixed-point bit-widths, and other hardware implementation specific parameters of the individual estimators to provide meaningful results. This optimization aims to achieve a common performance target for a typical orthogonal frequency-division multiplexing (OFDM) signal scenario.
在无线通信中,同相(I)和正交相(Q)不平衡是一个众所周知的问题,文献中存在大量不同的I/Q不平衡估计和补偿算法。其中许多算法,包括本研究中的算法,都侧重于减轻接收端I/Q失衡。我们考虑频率无关(FID)估计器作为所谓的盲算法运行,其中几乎不需要传输数据的知识。然而,很少有人对在硬件中实现这些算法所需的资源进行比较。在这项工作中,我们比较了在现场可编程门阵列(FPGA)上实现这些算法时,它们的逻辑利用率,所需寄存器和嵌入式乘法器的综合列表。随后,我们提供了基于SkyWater 130 nm开源工艺设计套件(PDK)的合成结果,可以比较相应专用集成电路(ASIC)设计所需的芯片面积。为了提供有意义的结果,我们优化了各个估计器的定点位宽度和其他硬件实现特定参数。该优化旨在实现典型正交频分复用(OFDM)信号场景的共同性能目标。
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引用次数: 0
Understanding the impact of contacts and top gate scaling on the reliability of nanoscale MoS2 FETs by TCAD modeling 通过TCAD建模了解触点和顶栅极缩放对纳米MoS2 fet可靠性的影响
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-03 DOI: 10.1016/j.mee.2025.112425
Yezhu Lv, Yajing Chai, Yehao Wu, Yury Yu. Illarionov
Localized defects in the edges of top gate insulators present a serious obstacle for scaling of field-effect transistors (FETs) with 2D channels. However, most experimental studies of their bias stability are performed on micron-scale prototypes. In these devices homogeneous trap distributions can be assumed since the edges are negligible as compared to the channel lengths, and thus their bias stability is mostly determined by the energy barrier between the oxide defect bands and the conduction band edge of the channel (for n-FETs). By doing technology computer aided design (TCAD) modeling for nanoscale MoS2/HfO2 FETs with edge trap distributions, here we for the first time demonstrate that the hysteresis and positive bias-temperature instabilities (PBTI) may strongly depend on the Fermi level pinning, type of S/D contact and top gate scaling. As a result, even favorable alignment of oxide defect bands with respect to the channel conduction band edge may result in poor bias stability and vice versa. With these findings we open a pathway towards reliability-aware design of scalable 2D electronics which is currently disregarded by the industry.
顶栅绝缘子边缘的局部缺陷严重阻碍了二维沟道场效应晶体管(fet)的缩放。然而,大多数关于其偏置稳定性的实验研究都是在微米尺度的原型上进行的。在这些器件中,由于边缘与沟道长度相比可以忽略不计,因此可以假设均匀的陷阱分布,因此它们的偏置稳定性主要取决于氧化物缺陷带和沟道导带边缘之间的能量势垒(对于n- fet)。通过对具有边缘陷阱分布的纳米级MoS2/HfO2 fet进行技术计算机辅助设计(TCAD)建模,我们首次证明了迟滞和正偏温不稳定性(PBTI)可能强烈依赖于费米能级钉钉、S/D接触类型和顶栅标度。因此,即使氧化物缺陷带相对于沟道导带边缘的有利排列也可能导致差的偏置稳定性,反之亦然。有了这些发现,我们为可扩展2D电子设备的可靠性感知设计开辟了一条道路,这一设计目前被业界所忽视。
{"title":"Understanding the impact of contacts and top gate scaling on the reliability of nanoscale MoS2 FETs by TCAD modeling","authors":"Yezhu Lv,&nbsp;Yajing Chai,&nbsp;Yehao Wu,&nbsp;Yury Yu. Illarionov","doi":"10.1016/j.mee.2025.112425","DOIUrl":"10.1016/j.mee.2025.112425","url":null,"abstract":"<div><div>Localized defects in the edges of top gate insulators present a serious obstacle for scaling of field-effect transistors (FETs) with 2D channels. However, most experimental studies of their bias stability are performed on micron-scale prototypes. In these devices homogeneous trap distributions can be assumed since the edges are negligible as compared to the channel lengths, and thus their bias stability is mostly determined by the energy barrier between the oxide defect bands and the conduction band edge of the channel (for n-FETs). By doing technology computer aided design (TCAD) modeling for nanoscale MoS<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span>/HfO<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span> FETs with edge trap distributions, here we for the first time demonstrate that the hysteresis and positive bias-temperature instabilities (PBTI) may strongly depend on the Fermi level pinning, type of S/D contact and top gate scaling. As a result, even favorable alignment of oxide defect bands with respect to the channel conduction band edge may result in poor bias stability and vice versa. With these findings we open a pathway towards reliability-aware design of scalable 2D electronics which is currently disregarded by the industry.</div></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":"302 ","pages":"Article 112425"},"PeriodicalIF":3.1,"publicationDate":"2025-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145465429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Charge-controlled memcapacitors for the output voltage ripple reduction in DC-DC buck converters DC-DC降压变换器中用于减少输出电压纹波的电荷控制mem电容器
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-27 DOI: 10.1016/j.mee.2025.112423
Francisco J. Romero, Víctor Toral, Diego P. Morales, Noel Rodríguez
Memcapacitors, due to their variable capacitance and non-volatile memory effect, are expected to cause a disruption across different areas of research and engineering. In the context of power electronics, memcapacitors have not yet been considered despite their potential for ripple reduction, voltage stabilization and improved energy efficiency. This work presents both simulation and experimental results demonstrating how incorporating a memcapacitor at the output of a DC-DC buck converter can significantly reduce the output voltage ripple. We first propose and validate a memcapacitor emulator that can be implemented using off-the-shelf components. After that, the memcapacitor emulator is used to study the output voltage ripple in the permanent regime of a DC-DC buck converter as well as its effect on the transient response. The results demonstrate that the use of a charge-controlled memcapacitor can reduce the output voltage ripple by up to 90 %. While the memcapacitor emulator serves as a practical tool for this investigation, the goal of this work is demonstrating the potential of memcapacitors for power electronics, evidencing the need for further research and development toward solid-state memcapacitor devices to unlock new possibilities for ripple reduction, energy efficiency, and voltage stabilization in advanced power electronics systems.
Memcapacitors由于其可变电容和非易失性存储器效应,预计将在不同的研究和工程领域造成破坏。在电力电子领域,尽管memcapacitors具有减少纹波、稳定电压和提高能效的潜力,但尚未被考虑。这项工作提供了仿真和实验结果,证明了在DC-DC降压转换器的输出端加入memcapacitor可以显着降低输出电压纹波。我们首先提出并验证了一个memcapacitor模拟器,它可以使用现成的组件来实现。在此基础上,利用memcapacitor仿真器研究了DC-DC降压变换器的输出电压纹波及其对瞬态响应的影响。结果表明,使用电荷控制的memcapacitor可以减少输出电压纹波达90%。虽然memcapacitor模拟器是本研究的实用工具,但这项工作的目标是展示memcapacitor在电力电子领域的潜力,证明需要进一步研究和开发固态memcapacitor器件,以解锁先进电力电子系统中纹波减少,能效和电压稳定的新可能性。
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引用次数: 0
Process development and integration of hybrid bonding for wafers with multi-type bonding pads 多类型键合片混合键合的工艺开发与集成
IF 3.1 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-13 DOI: 10.1016/j.mee.2025.112420
Guoqiang Zhao , Yi Zhao
Hybrid bonding technology is widely concerned in the field of advanced packaging, due to its high density and short distance. Current research focuses on the implementation of wafers with only one type of pad. However, integrating multi-type pads on the same wafer introduces huge challenges in process control, especially ensuring tight concave variations across all copper pads during the CMP step. In this work, the novel hybrid bonding process for wafers featuring pads of various sizes and shapes has been developed and verified. Characterization techniques such as AFM, SEM, TEM and EDS were adopted to conduct in-depth analysis of the interest region before and after bonding, confirming the effectiveness of the strategy. These results can provide guidance for flexibilizing pad design, optimizing bonding process, and enhancing bonding quality under complex scenarios.
杂化键合技术以其高密度、距离短等优点在先进封装领域受到广泛关注。目前的研究主要集中在只有一种衬垫的晶圆的实现上。然而,在同一晶圆上集成多种类型的衬垫,在工艺控制方面带来了巨大的挑战,特别是在CMP步骤中确保所有铜衬垫的凹度变化。在这项工作中,开发并验证了具有各种尺寸和形状的晶圆片的新型混合键合工艺。采用AFM、SEM、TEM、EDS等表征技术对键合前后的兴趣区域进行深入分析,证实了该策略的有效性。研究结果可为复杂场景下柔性焊盘设计、优化键合工艺、提高键合质量提供指导。
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引用次数: 0
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Microelectronic Engineering
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