Dawson B. Bonneville, W. Hendriks, S. Mardani, Nadia Chahir, Bjorn Jongebloed, M. Dijkstra, S. García-Blanco
{"title":"Sputter-deposited aluminium oxide as a waveguide platform for UV photonics","authors":"Dawson B. Bonneville, W. Hendriks, S. Mardani, Nadia Chahir, Bjorn Jongebloed, M. Dijkstra, S. García-Blanco","doi":"10.1117/12.3004840","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517593,"journal":{"name":"Integrated Optics: Devices, Materials, and Technologies XXVIII","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Integrated Optics: Devices, Materials, and Technologies XXVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3004840","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}