Miniaturized electric field sensors with enhanced sensitivity down to 5.2 μV/(m.Hz1/2)

Abstract

With the progression of information technology and the trend of ubiquitous connectivity, the measurement of weak electromagnetic signals assumes an irreplaceable role. As an illustration, it holds significance in monitoring the reliability of power systems, evaluating the electromagnetic compatibility within semiconductor foundries, and facilitating radar imaging for vehicles. Optical electric field measurement offers rapid response time and broad bandwidth capability. However, due to material and fabrication limitations, challenges persist, such as sensitivity, long-term stability, and miniaturization.