A Microfabricated Column Comprised of High-Aspect-Ratio Silicon Pillar Arrays for Micro-Gas Chromatography

Abstract

This study introduces the fabrication and application of a micro-pillar array using MEMS processes to improve the performance of a crucial component, the separation column, within µ-GC systems. These micro-pillars, measuring approximately 2μm in diameter and 130μm in height, were densely packed at a density of around 9000 rods/mm2 onto the separation column. The substitution of the conventional rectangular-shaped column with pillar arrays resulted in an approximate 40% increase in resolution under identical pressure and oven temperature conditions (0.969psi, 40℃). These findings mark a significant advancement in µ-GC technology, potentially enabling chip size reduction, reduced power consumption, and minimized packaging volume.