{"title":"Avalanche Photoionization Detector","authors":"Xiaheng Huang, Weishu Wu, Xudong Fan","doi":"10.1109/MEMS58180.2024.10439447","DOIUrl":null,"url":null,"abstract":"This paper reports a microfluidic gas sensor termed avalanche photoionization detector (APID). The APID employs miniaturized vacuum-UV (VUV) lamp as a photoionization source to ionize volatile organic compounds (VOCs) within a microfluidic ionization chamber made of a MgF2 substrate bonded to an etch-through silicon microfluidic channel. The resultant electrons are collected by a reversely-biased avalanche P/N junction and subsequently undergo an avalanche process within the junction's depletion region, resulting in a substantial internal gain.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 3","pages":"856-858"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439447","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
This paper reports a microfluidic gas sensor termed avalanche photoionization detector (APID). The APID employs miniaturized vacuum-UV (VUV) lamp as a photoionization source to ionize volatile organic compounds (VOCs) within a microfluidic ionization chamber made of a MgF2 substrate bonded to an etch-through silicon microfluidic channel. The resultant electrons are collected by a reversely-biased avalanche P/N junction and subsequently undergo an avalanche process within the junction's depletion region, resulting in a substantial internal gain.
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