{"title":"Miniaturized Flow Sensor Based On Thermal Feedback And Digitized Power Distribution","authors":"Minghao Huang, Izhar, Xiangyu Song, Linze Hong, Ruining Xu, Wei Xu","doi":"10.1109/MEMS58180.2024.10439422","DOIUrl":null,"url":null,"abstract":"In this paper, we have proposed a miniaturized flow sensor based on thermal feedback and digitized power distribution across two microheaters. The performance of the sensor has been verified by nitrogen (N2) gas flow from -11 m/s to 11 m/s. Our findings show a significant improvement in sensitivity, which is 10.69 %/m/s, as compared to its counterpart using a simple thermal feedback strategy with voltage redistribution. Besides, our sensor achieved an excellent long-term (15 mins) signal stability with a sensor resolution of up to 7.5 mm/s. Notably, this sensor system maintains excellent sensitivity even at low signal amplification gains, indicating that this strategy will help enable highly robust solid-state flow sensor designs in the future.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"219 3","pages":"817-820"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439422","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we have proposed a miniaturized flow sensor based on thermal feedback and digitized power distribution across two microheaters. The performance of the sensor has been verified by nitrogen (N2) gas flow from -11 m/s to 11 m/s. Our findings show a significant improvement in sensitivity, which is 10.69 %/m/s, as compared to its counterpart using a simple thermal feedback strategy with voltage redistribution. Besides, our sensor achieved an excellent long-term (15 mins) signal stability with a sensor resolution of up to 7.5 mm/s. Notably, this sensor system maintains excellent sensitivity even at low signal amplification gains, indicating that this strategy will help enable highly robust solid-state flow sensor designs in the future.
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