A Highly Integrated and Low-Power SNO2 Gas Sensor Cell for the Detection of Gas Mixture

Abstract

This study reports a highly integrated and low-power temperature-modulated gas sensor cell aimed at detecting mixed gases. This design of six channels with a shared common grounded terminal ensures independent detection capability for each channel while reducing the usage of electrode pads, thereby enhancing device integration. Additionally, the six channels share a single heater but operate at different heating temperatures, enabling certain gas recognition capabilities. By investigating the response of the sensor cell to three food-related gases introduced in different sequences, this preliminary research has laid the foundation for modeling the response of the sensor cell to mixed gases. The developed model achieved a matching accuracy of 94.8% between its predicted results and the actual response, suggesting its potential for reliable gas mixture detection.