Electronic Nose Based on the Integration of MEMS Multi-Sensor and CMOS Circuit

Abstract

This paper reports a new design of electronic nose based on MEMS (Micro Electromechanical System) multi-sensor and CMOS (Complementary Metal Oxide Semiconductor) circuit. An array of multiple gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Silicon below the suspended membrane is etching completely through the wafer. The chip is then flipped and bonded to CMOS device. It not only simplifies the integration technology with CMOS chip, but also improve the conductivity of the connection. This design shows its potential for precise and rapid response of environment gas sensing and opens new opportunities for the fabrication of electronic nose and future development of bionic olfactory microsystems.