{"title":"A Biochemical Sensor Based on a Surface Lattice Resonance Metasurface in the Near-Infrared Band","authors":"Liye Li, Lijun Ma, Wengang Wu","doi":"10.1109/MEMS58180.2024.10439383","DOIUrl":null,"url":null,"abstract":"This paper reports a biochemical sensor based on the reflection-type surface lattice resonance (SLR) mechanism in an all-metal metasurface in the near-infrared band. The sensor promotes SLR practicality and has better sensing performances than traditional plasmonic sensors, with a sensitivity of 796.6 nm/RIU and a figure of merit (FoM) of 39.13. The detection limits of NaCl and glucose solution are down to 0.5% and 1% respectively. With surface functionalization, the sensor detects the low concentration (0.5 µg/ml) of the carcinoembryonic antigen (CEA) specifically and efficiently.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 4","pages":"1055-1058"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439383","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
This paper reports a biochemical sensor based on the reflection-type surface lattice resonance (SLR) mechanism in an all-metal metasurface in the near-infrared band. The sensor promotes SLR practicality and has better sensing performances than traditional plasmonic sensors, with a sensitivity of 796.6 nm/RIU and a figure of merit (FoM) of 39.13. The detection limits of NaCl and glucose solution are down to 0.5% and 1% respectively. With surface functionalization, the sensor detects the low concentration (0.5 µg/ml) of the carcinoembryonic antigen (CEA) specifically and efficiently.
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