A Synthetic Jets Cooling Device Based on Piezoelectric ALN Mems Actuators

Abstract

This study presents a synthetic jets cooling device with silicon-based piezoelectric MEMS actuators. The device, with an area of 100mm2 and driven by 5V, can generate synthetic jets with an air velocity of 2.7 m/s and cool down a heater with a steady state temperature of 85 °C by 20 °C in 1 minute. The silicon-based MEMS solution facilitates higher accuracy, reproducibility and uniformity for better manufacturability, and paves way for reduction in size and cost. It should be noted that the piezoelectric actuators are based on aluminum nitride thin film compared with commonly used lead zirconate titanate, endowing low power consumption of 280 mW.