A comparative pyrolysis study of tetraethoxysilane and tetraethoxymethane: Insight into congener substitution effects on pyrolysis chemistry of siloxane flame synthesis precursors

Qilong Fang , Jun Fang , Tianyou Lian , Long Zhao , Wei Li , Yuyang Li
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Abstract

The pyrolysis of siloxane precursors, such as tetraethoxysilane (TEOS), is commonly employed in the flame synthesis and chemical vapor deposition of silica nanoparticles. In this work, the flow reactor pyrolysis of TEOS is studied using gas chromatography (GC) and synchrotron vacuum ultraviolet photoionization mass spectrometry (SVUV-PIMS), and the congener substitution effects from the central C atom to the central Si atom are investigated through comparison with its hydrocarbon counterpart tetraethoxymethane (TEOM). Pyrolysis models of TEOS and TEOM are constructed and validated against the measured results. Modeling analysis, including rate of production analysis and sensitivity analysis, provides insights into chemistry in fuel consumption and product formation. In contrast, the observations of silicon-containing products in SVUV-PIMS experiments provide evidence for crucial decomposition pathways of TEOS. It is observed that TEOS exhibits significantly higher stability than TEOM under pyrolysis conditions. The most abundant products in the pyrolysis of TEOS and TEOM are ethylene and ethanol, and TEOS produces more hydrocarbon products than TEOM. The lower pyrolysis reactivity of TEOS is attributed to the slower unimolecular decomposition reaction which dominates the decomposition of TEOS than TEOM. This can be explained by the hindrance of the extremely strong Si-O bond resulting from the significantly different electronegativity between Si and O. The higher initial decomposition temperature of TEOS enhances the contribution of other decomposition channels, such as C-C bond dissociation and H-abstraction reactions, in TEOS consumption. This leads to the abundant formation of hydrocarbon productions such as methane, ethane, and acetaldehyde. As the main pyrolysis product, the ethanol produced by TEOM pyrolysis is four times that of TEOS due to the congener substitution effects. The ethanol formation pathway in TEOS pyrolysis is different from that in TEOM pyrolysis, which is mainly formed via a newly proposed multi-step mechanism, resulting in a lower yield in TEOS pyrolysis.

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四乙氧基硅烷和四乙氧基甲烷热解对比研究:洞察同系物取代对硅氧烷火焰合成前体热解化学的影响
硅氧烷前体(如四乙氧基硅烷(TEOS))的热解通常用于二氧化硅纳米粒子的火焰合成和化学气相沉积。本研究采用气相色谱法(GC)和同步辐射真空紫外光离子化质谱法(SVUV-PIMS)对 TEOS 的流动反应器热解过程进行了研究,并通过与其碳氢化合物对应物四乙氧基甲烷(TEOM)进行比较,研究了从中心 C 原子到中心 Si 原子的同系物取代效应。建立了 TEOS 和 TEOM 的热解模型,并根据测量结果进行了验证。模型分析(包括生产率分析和敏感性分析)为燃料消耗和产品形成中的化学反应提供了见解。相反,在 SVUV-PIMS 实验中观察到的含硅产物为 TEOS 的关键分解途径提供了证据。据观察,在热解条件下,TEOS 的稳定性明显高于 TEOM。TEOS 和 TEOM 热解过程中最丰富的产物是乙烯和乙醇,而且 TEOS 产生的烃类产物比 TEOM 更多。TEOS 的热解反应活性较低,这是因为 TEOS 的单分子分解反应比 TEOM 慢,而 TEOM 的分解反应主要是单分子分解反应。TEOS 较高的初始分解温度提高了其他分解途径(如 C-C 键解离和 H-萃取反应)对 TEOS 消耗的贡献。这导致甲烷、乙烷和乙醛等碳氢化合物的大量生成。作为主要的热解产物,由于同系物取代效应,TEOM 热解产生的乙醇是 TEOS 的四倍。TEOS 热解过程中乙醇的形成途径与 TEOM 热解过程中乙醇的形成途径不同,TEOM 热解过程中乙醇主要通过新提出的多步骤机制形成,因此 TEOS 热解过程中乙醇的产率较低。
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