{"title":"Alignment error modeling and control of a double-sided microlens array during precision glass molding","authors":"Zihao Zeng, Tianfeng Zhou, Qian Yu, Jia Zhou, Gang Wang, Qiuchen Xie, Zifan Wang, Xiaoqiang Yao, Yubing Guo","doi":"10.1038/s41378-024-00668-7","DOIUrl":null,"url":null,"abstract":"<p>Double-sided microlens arrays (DSMLAs) include combinations of two single-sided MLAs to overcome positioning errors and greatly improve light transmissivity compared to other types of lenses. Precision glass molding (PGM) is used to fabricate DSMLAs, but controlling alignment errors during this process is challenging. In this paper, a mold assembly was manufactured with a novel combination of materials to improve the alignment accuracy of mold cores during PGM by using the nonlinear thermal expansion characteristics of the various materials to improve the DSMLA alignment accuracy. By establishing a mathematical model of the DSMLA alignment error and a thermal expansion model of the mold-sleeve pair, the relationship between the maximum alignment error of the DSMLA and the mold-sleeve gap was determined. This research provides a method to optimize the mold-sleeve gap and minimize the alignment error of the DSMLA. The measured DSMLA alignment error was 10.56 μm, which is similar to the predicted maximum alignment error. Optical measurements showed that the uniformity of the homogenized beam spot was 97.81%, and the effective homogeneous area accounted for 91.66% of the total area. This proposed method provides a novel strategy to improve the performance of DSMLAs.</p><figure></figure>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":null,"pages":null},"PeriodicalIF":7.3000,"publicationDate":"2024-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-024-00668-7","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
Double-sided microlens arrays (DSMLAs) include combinations of two single-sided MLAs to overcome positioning errors and greatly improve light transmissivity compared to other types of lenses. Precision glass molding (PGM) is used to fabricate DSMLAs, but controlling alignment errors during this process is challenging. In this paper, a mold assembly was manufactured with a novel combination of materials to improve the alignment accuracy of mold cores during PGM by using the nonlinear thermal expansion characteristics of the various materials to improve the DSMLA alignment accuracy. By establishing a mathematical model of the DSMLA alignment error and a thermal expansion model of the mold-sleeve pair, the relationship between the maximum alignment error of the DSMLA and the mold-sleeve gap was determined. This research provides a method to optimize the mold-sleeve gap and minimize the alignment error of the DSMLA. The measured DSMLA alignment error was 10.56 μm, which is similar to the predicted maximum alignment error. Optical measurements showed that the uniformity of the homogenized beam spot was 97.81%, and the effective homogeneous area accounted for 91.66% of the total area. This proposed method provides a novel strategy to improve the performance of DSMLAs.
期刊介绍:
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.