Direct nanosecond laser metallization of AlN ceramics

Abstract

In this paper, a study of the influence of laser processing parameters with pulsed nanosecond laser radiation on the degree of metallization and the quality of the metallized surface of aluminum nitride ceramics is presented. Experiments were carried out to create conductive structures with the lowest resistance using direct laser metallization. The dependences of resistance on duration, pulse overlap, and laser fluence were obtained and analyzed, and changes in surface roughness were considered. In addition, the composition of the surface of laser-metallized ceramics was studied using energy-dispersive x-ray spectroscopy. As a result, it was shown that the resistance is inversely proportional to the square root of the pulse duration, the thermal diffusion length was estimated as l_T = 8.2 μm for 200 ns and l_T = 1.2 μm for 4 ns, and the presence of optimal values of pulse overlap Oy (scanning direction) equal to 50% and pulse overlap Ox (step direction) equal to 96% and 99.7% for pulse durations of 200 and 4 ns, respectively, was determined. The choice of optimal pulse overlaps with the highest laser fluence allowed us to obtain the minimum resistance value with maximum performance.