Effective thermal conductivity of poly-silicon chunks and its size dependence in a melting process of silicon Czochralski crystal growth: Part 1. Temperature measurements
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Abstract
Relation between temperature distribution in a crucible and size of poly-silicon chunks is investigated in a melting process of silicon Czochralski (CZ) method. Five kinds of feedstocks with a different size are heated up to about 1,000 °C in a crucible and the temperature distributions and thermal gradients are measured with six thermocouples. Two sizes of commercial poly-silicon chunks and three sizes of cylindrical graphite pellets are tested. The result is that the lager the particle size is, the lager the thermal conductivity is for both poly-silicon chunks and graphite pellets. Averaged sizes of clashed poly-silicon are defined and measured, and also void porosities in various samples are measured. The results of these measurements are to be used in comparisons with numerical simulations in the article Part 2.
期刊介绍：
The journal offers a common reference and publication source for workers engaged in research on the experimental and theoretical aspects of crystal growth and its applications, e.g. in devices. Experimental and theoretical contributions are published in the following fields: theory of nucleation and growth, molecular kinetics and transport phenomena, crystallization in viscous media such as polymers and glasses; crystal growth of metals, minerals, semiconductors, superconductors, magnetics, inorganic, organic and biological substances in bulk or as thin films; molecular beam epitaxy, chemical vapor deposition, growth of III-V and II-VI and other semiconductors; characterization of single crystals by physical and chemical methods; apparatus, instrumentation and techniques for crystal growth, and purification methods; multilayer heterostructures and their characterisation with an emphasis on crystal growth and epitaxial aspects of electronic materials. A special feature of the journal is the periodic inclusion of proceedings of symposia and conferences on relevant aspects of crystal growth.
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