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Ultra-large β-Ga2O3 nanobelt and nanobelt-based multi-MOSFET integration 超大β-Ga2O3纳米带及基于纳米带的多mosfet集成
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-26 DOI: 10.1016/j.jcrysgro.2026.128505
Haifeng Chen , Zijie Ding , Chunling Chen , Xuyang Liu , Xiexin Sun , Zhihong Wei , Jun Ma , Yifan Jia , Yue Hao
In this work, ultra-large β-Ga2O3 nanobelts with millimeter-long and hundreds-of-micron-wide dimensions are synthesized using the carbon thermal reduction method. The maximum width of nanobelts is 352 μm. The nanobelts are of high-purity β phase with a thickness of approximately 65 nm, and their surface is defect-free and smooth with a root mean square roughness of 370 pm. The optimal growth direction of nanobelt is [010], and the easy cleavage planes are (1¯ 12) and (1¯1¯ 2). Based on the nanobelts, multi-MOSFET device process integration is carried out, and a 150 × 150 μm2 source/drain electrode placement is achieved on a 165 μm-wide nanobelt. The dark drain current is extremely low of about 10-13 A. Under the 254 nm solar-blind UV light, MOSFET exhibits the excellent gate control characteristics. This study highlights the significant application potential of the distinctive crystal morphology of β-Ga2O3 nanobelts in future microelectronics.
本文采用碳热还原法制备了长毫米、宽数百微米的超大尺寸β-Ga2O3纳米带。纳米带的最大宽度为352 μm。纳米带为高纯度β相,厚度约为65 nm,表面光滑无缺陷,均方根粗糙度为370 pm。纳米带的最佳生长方向为[010],易解理面为(1¯12)和(1¯1¯2)。基于该纳米带,实现了多mosfet器件的工艺集成,并在165 μm宽的纳米带上实现了150 × 150 μm2的源极/漏极放置。暗漏电流极低,约为10-13 A。在254 nm的太阳盲紫外光下,MOSFET表现出优异的栅极控制特性。该研究突出了β-Ga2O3纳米带独特的晶体形态在未来微电子领域的重要应用潜力。
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引用次数: 0
Photoluminescence-based dopant imaging of Ga-, P- and Sb-doped Czochralski-grown silicon wafers for solar cells 太阳能电池用掺Ga、P和sb硅晶圆的光致发光掺杂成像
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-23 DOI: 10.1016/j.jcrysgro.2026.128504
Afsaneh Kashizadeh , Rabin Basnet , Khoa Nguyen , Stephane Armand , Christian Samundsett , Wei Han , Yichun Wang , AnYao Liu , Daniel Macdonald
Recharged Czochralski (RCz) silicon is now the dominant substrate for industrial photovoltaics, yet research on radial dopant uniformity remains limited. In this study, we apply high-resolution steady-state photoluminescence (PL) imaging of the doping concentration, calibrated using eddy-current resistivity measurements, to characterize radial and axial dopant distributions in RCz-grown silicon wafers doped with antimony (Sb), phosphorus (P), and gallium (Ga). Despite their markedly different segregation coefficients, all three dopants exhibit highly uniform radial concentration profiles, with only weak (<10%) reductions in dopant concentration toward the wafer edges. These trends are consistent with the suppression of radial concentration gradients by crystal-crucible counter-rotation in the RCz process. Localized variations observed in the central ∼30 mm region are attributed to dopant redistribution driven by buoyancy- and Marangoni-driven melt convection. Axially along the length of the ingot, the wafers exhibit dopant distributions that are consistent with the combined effects of dopant segregation and evaporation: Sb-doped wafers show minimal doping variation along the ingot, whereas P- and Ga-doped wafers exhibit increasing doping concentrations toward the ingot tail. Calibrated PL measurements also reveal changes in apparent doping concentration arising from oxygen-related thermal donor (TD) formation and annihilation in Sb-doped samples after thermal treatments. These results demonstrate that RCz growth yields wafers with excellent radial dopant uniformity for the n- and p-type dopants studied here.
可充电奇克拉尔斯基硅(RCz)是目前工业光伏的主要衬底,但对径向掺杂均匀性的研究仍然有限。在这项研究中,我们应用高分辨率稳态光致发光(PL)成像的掺杂浓度,使用涡流电阻率测量校准,以表征径向和轴向的掺杂分布在rcz生长的硅晶圆掺杂锑(Sb),磷(P)和镓(Ga)。尽管这三种掺杂剂的偏析系数明显不同,但它们的径向浓度分布高度均匀,沿晶圆边缘的掺杂剂浓度只有微弱的(<10%)下降。这些趋势与晶体-坩埚反旋转对径向浓度梯度的抑制是一致的。在中心~ 30 mm区域观测到的局部变化归因于浮力和marangoni驱动的熔体对流驱动的掺杂剂再分布。沿铸锭长度轴向,晶圆的掺杂分布与掺杂偏析和蒸发的综合效应一致:sb掺杂晶圆沿铸锭方向的掺杂变化最小,而P和ga掺杂晶圆沿铸锭尾部的掺杂浓度增加。校准后的PL测量还揭示了在热处理后,由氧相关热供体(TD)的形成和湮灭引起的表观掺杂浓度的变化。这些结果表明,对于本文研究的n型和p型掺杂剂,RCz生长产生的晶圆具有优异的径向掺杂均匀性。
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引用次数: 0
Fabrication of N-polar AlN films on 4H-SiC substrates via polarity inversion technique 极性反转技术在4H-SiC衬底上制备n极性AlN薄膜
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-22 DOI: 10.1016/j.jcrysgro.2026.128503
Yuning Wang , Tomohiro Tamano , Tomoya Higashi , Ryota Akaike , Hiroki Yasunaga , Hideto Miyake
N-polar aluminum nitride (AlN) is an ultra-wide bandgap semiconductor with significant potential not only in optical devices but also in high-power, high-frequency, and high-temperature electronic applications. However, the epitaxial growth of device-grade N-polar AlN films has been hindered by challenges in controlling surface kinetics and polarity. In this study, we demonstrate the fabrication of high-quality N-polar AlN films on Si-face 4H-SiC substrates by combining sputter deposition with face-to-face annealing (FFA Sp), and employing a controlled polarity inversion technique. The resulting N-polar AlN films were crack-free and exhibited atomically smooth surfaces, with a root-mean-square (RMS) roughness of approximately 0.15  nm. The full width at half maximum (FWHM) values of the X-ray rocking curves for the (0002) and (10–12) diffraction peaks were measured to be 89 arcsec and 238 arcsec, respectively, corresponding to threading dislocation density (TDD) of approximately 6.5 × 108 cm−2. Cross-sectional TEM analysis confirmed similarly low TDD (∼1.5 × 108 cm−2). These results demonstrate an effective and scalable route for achieving high-quality N-polar AlN films on 4H-SiC substrates.
n极氮化铝(AlN)是一种超宽带隙半导体,不仅在光学器件,而且在高功率、高频和高温电子应用中具有重要的潜力。然而,器件级n极性AlN薄膜的外延生长一直受到表面动力学和极性控制方面的挑战的阻碍。在这项研究中,我们展示了通过结合溅射沉积和面对面退火(FFA Sp),并采用可控极性反转技术,在Si-face 4H-SiC衬底上制备高质量的n极性AlN薄膜。得到的n极性AlN薄膜无裂纹,表面原子光滑,均方根(RMS)粗糙度约为0.15 nm。(0002)和(10-12)衍射峰的x射线摇摆曲线的半最大值全宽度(FWHM)值分别为89 arcsec和238 arcsec,对应的螺纹位错密度(TDD)约为6.5 × 108 cm−2。横断面TEM分析证实了类似的低TDD (~ 1.5 × 108 cm−2)。这些结果证明了在4H-SiC衬底上获得高质量n极AlN薄膜的有效和可扩展的途径。
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引用次数: 0
Controlled synthesis of Mg(OH)2 with tailored crystal morphologies from brucite via hydration: Morphological evolution mechanism and hydration kinetics 水合作用下由水镁石合成具有特定晶体形态的Mg(OH)2:形态演化机制和水合动力学
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-17 DOI: 10.1016/j.jcrysgro.2026.128501
Yanbing Zhu , Yubai Zhang , Jiani Wang , Songyan Jia , Yali Ma , Gang Li , Xue Li , Qiang Zheng
Brucite, an underutilized magnesium-rich mineral, exhibits untapped potential for magnesium hydroxide (Mg(OH)2) production, yet its utility in fabrication non-typical crystal morphologies remains underexplored. This study presents a novel strategy for the controlled synthesis of Mg(OH)2 with a unique triangular pyramidal morphology via a calcination-hydration process using brucite, coupled with a systematic elucidation of its morphological evolution and hydration kinetics. The results reveal that the triangular pyramidal structure is attributed to the selective adsorption of H2SiO42− on specific crystal planes during initial hydration. As hydration proceeds, a dissolution–recrystallization mechanism governs the morphological evolution from triangular pyramids to hexagonal plates, with edge and vertex dissolution of initial nuclei underpinning the formation of thermodynamically stable hexagonal lamellae. Kinetic analysis, employing the Avrami model and Arrhenius equation, reveals that the hydration process is governed by synergistic nucleation and growth behavior, with finer brucite particles exhibiting a lower activation energy (26.22 kJ·mol−1) and faster reaction rates compared to coarser particles (46.20 kJ·mol−1). This work not only elucidates the Si-mediated morphological evolution mechanism of Mg(OH)2 from brucite but also provides critical kinetic insights for optimizing the synthesis of special crystal morphologies, providing a viable pathway to valorize low-grade brucite resources for advanced functional material applications.
水镁石是一种未被充分利用的富镁矿物,具有未开发的氢氧化镁(Mg(OH)2)生产潜力,但其在制造非典型晶体形态方面的应用仍未得到充分开发。本研究提出了一种利用水镁石煅烧-水化工艺合成具有独特三角锥体形态的Mg(OH)2的新策略,并对其形态演化和水化动力学进行了系统的阐明。结果表明,在初始水化过程中,H2SiO42−选择性吸附在特定的晶体平面上,形成了三角锥体结构。随着水化过程的进行,溶解-再结晶机制控制了从三角形金字塔到六边形板的形态演变,初始核的边缘和顶点溶解支撑了热力学稳定的六边形片层的形成。采用Avrami模型和Arrhenius方程的动力学分析表明,水化过程受协同成核和生长行为控制,较粗的水镁石颗粒(46.20 kJ·mol−1)具有较低的活化能(26.22 kJ·mol−1)和较快的反应速率。本研究不仅阐明了硅在水镁石中生成Mg(OH)2的形态演化机制,而且为优化合成特殊晶体形态提供了关键的动力学见解,为低品位水镁石资源的增值提供了一条可行的途径,为先进功能材料的应用提供了可能。
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引用次数: 0
Numerical simulation of mass transfer and hydrodynamics in confined growth of KDP crystals KDP晶体受限生长传质与流体力学数值模拟
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-10 DOI: 10.1016/j.jcrysgro.2026.128491
Zhongjun Cao , Jianyu Bai , Guokai Hao , Yang Li , Guodong Lei , Lisong Zhang , Mingxia Xu , Hongkai Ren , Baoan Liu , Xun Sun
A high-efficiency gradient-refractive-index deuterated potassium dihydrogen phosphate (DKDP) crystal, prepared via a confined growth method based on the point-seed rapid growth technique, demonstrates optimized broadband third-harmonic generation performance. By restricting crystal growth within a cylindrical glass tube, this work systematically reveals the critical effects of confinement on mass transport and convective dynamics during crystal growth. Numerical simulations employing the finite volume method with the SST k-ω turbulence model are utilized to elucidate the regulatory mechanisms of rotation speed on both the magnitude and uniformity of surface supersaturation. Following preliminary screening of rotation parameters, orthogonal experimental design enabled the multivariate optimization of cylindrical glass tube dimensions (diameter/height) and rotation speed within predefined boundaries. Through comprehensive analysis of convective transport characteristics and surface supersaturation distributions under diverse parameter combinations, a theoretical framework integrating growth vessel design and kinetic parameter matching is established. This work provides a usable method for the controllable growth of functional crystals.
采用基于点种子快速生长技术的受限生长方法制备了一种高效梯度折射率氘化磷酸二氢钾(DKDP)晶体,该晶体具有优化的宽带三次谐波产生性能。通过限制晶体在圆柱形玻璃管内的生长,本工作系统地揭示了晶体生长过程中限制对质量输运和对流动力学的关键影响。采用有限体积法和SST k-ω湍流模型进行了数值模拟,阐明了转速对表面过饱和大小和均匀性的调节机制。在对旋转参数进行初步筛选后,采用正交实验设计,在预先设定的边界内对圆柱形玻璃管尺寸(直径/高度)和旋转速度进行多元优化。通过综合分析不同参数组合下的对流输送特性和表面过饱和分布,建立了生长容器设计与动力学参数匹配相结合的理论框架。这项工作为功能晶体的可控生长提供了一种可行的方法。
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引用次数: 0
Efficient thermal field optimization of PVT simulations for SiC single crystal growth SiC单晶生长PVT模拟的高效热场优化
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-10 DOI: 10.1016/j.jcrysgro.2026.128490
Lorenz Taucher , Zaher Ramadan , René Hammer , Stefan Defregger , Peter Auer , Lorenz Romaner
The physical vapor transport (PVT) method is the most commonly applied growth technique for bulk SiC single crystals. Nowadays, the increasing demand of SiC substrates inevitably requires the adaption of PVT reactors to larger boule diameters. Since the boule quality and the single-crystal yield are primarily dependent on the thermal field inside the growth chamber and its stability, the control and optimization of the thermal conditions are the most crucial aspects to address. In this respect, the temperature difference along the seed, in the source and between source and seed, in addition to the growth temperature, are of particular interest. Due to the quasi-closed nature of the PVT system, in-situ measurements are hardly feasible, making numerical simulations the primary tool for analyzing the thermal field. But, since the high computational demand of these simulations restricts the number of cases that can be practically evaluated, numerical in-depth investigations are constrained. Attributed to this, the present study demonstrates an efficient way for constrained multi-objective optimization of the thermal field of PVT simulations by leveraging the correlation within the data through singular value decomposition (SVD). A 6-inch inductively heated PVT reactor is taken as a representative example and is optimized by combining machine learning models with numerical simulation data and optimization algorithms. In general, this approach enables the identification of optimal process parameters and reactor configurations, while revealing inherent tradeoffs between objectives and operational limitations, regardless of the PVT furnace operation principle (resistive or inductive) or seed crystal diameter (6-inch, 8-inch, etc.). Furthermore, it allows for an in-depth analysis of optimal settings, parameter sensitivities, interdependencies and solution robustness.
物理气相输运(PVT)法是块状碳化硅单晶最常用的生长技术。如今,对SiC衬底的需求不断增加,必然要求PVT反应器适应更大的孔径。由于气泡质量和单晶产量主要取决于生长腔内的热场及其稳定性,因此热条件的控制和优化是需要解决的最关键方面。在这方面,除了生长温度外,沿种子、源内和源与种子之间的温差也特别令人感兴趣。由于PVT系统的准封闭性,现场测量很难实现,因此数值模拟是分析热场的主要工具。但是,由于这些模拟的高计算需求限制了可以实际评估的情况的数量,因此数值深入研究受到了限制。基于此,本研究通过奇异值分解(SVD)利用数据间的相关性,为PVT模拟热场的约束多目标优化提供了一种有效的方法。以6英寸感应加热PVT反应器为代表,采用机器学习模型、数值模拟数据和优化算法相结合的方法进行优化。一般来说,这种方法能够识别最佳工艺参数和反应器配置,同时揭示目标和操作限制之间的内在权衡,而不考虑PVT炉的操作原理(电阻或电感)或晶种直径(6英寸,8英寸等)。此外,它允许对最佳设置,参数敏感性,相互依赖性和解决方案鲁棒性进行深入分析。
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引用次数: 0
Study on the transport of phosphorus dopant during the n-type monocrystalline silicon growth by Czochralski technique 用Czochralski法研究n型单晶硅生长过程中磷掺杂的输运
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-09 DOI: 10.1016/j.jcrysgro.2026.128492
Junling Ding , Haowen Yu , Zaoyang Li , Qiping Chen , Pengfei Wang , Lijun Liu
The distribution of phosphorus dopant in silicon has an important influence on the resistivity of silicon crystals. A two-dimensional transient global model is established in this paper to investigate the transport of phosphorus dopant during the iso-diameter growth of 200 mm Czochralski monocrystalline silicon. We focused on the dynamic consumption process of phosphorus dopant in the silicon melt during crystal growth, and analyzed the effects of segregation and evaporation behavior, as well as the turbulent viscosity on the transport of phosphorus dopant. The results reveal that the concentration of phosphorus dopant at crystal-melt interface exhibits a trend in which the concentration is elevated at the center compared to the edge. Furthermore, the phosphorus dopant concentration in the melt progressively increases with crystal growth, resulting in a higher content in the tail of monocrystalline silicon compared to the head. By comparing with the experimental data, it is confirmed that when calculating the transport of phosphorus dopant in the melt, the melt turbulent viscosity and the evaporation behavior of phosphorus needs to be considered. At the same time, we also determined the evaporation coefficient for accurately calculating phosphorus dopant distribution.
磷掺杂剂在硅中的分布对硅晶体的电阻率有重要影响。本文建立了一个二维瞬态全局模型,研究了200 mm直系单晶硅等径生长过程中磷掺杂物的输运。重点研究了晶体生长过程中磷掺杂剂在硅熔体中的动态消耗过程,分析了偏析和蒸发行为以及湍流粘度对磷掺杂剂输运的影响。结果表明,晶体-熔体界面处磷掺杂物的浓度呈现出中心浓度高于边缘浓度的趋势。此外,熔体中磷掺杂物的浓度随着晶体的生长而逐渐增加,导致单晶硅尾部的含量高于头部。通过与实验数据的对比,证实了在计算磷掺杂剂在熔体中的输运时,需要考虑熔体湍流粘度和磷的蒸发行为。同时,我们还确定了蒸发系数,以便准确计算磷掺杂物的分布。
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引用次数: 0
Characterization of III-V layers grown on Ge|Si virtual substrates fabricated by LT-PECVD for photovoltaic devices LT-PECVD制备的Ge|Si虚拟衬底上生长的III-V层的表征
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-09 DOI: 10.1016/j.jcrysgro.2026.128493
Elisa García-Tabarés , Víctor Orejuela , Ignacio Rey-Stolle , Verónica Braza , Daniel F. de los Reyes , Paula Mouriño , Raquel Resta , Víctor J. Gómez , Pere Roca i Cabarrocas , Iván García
The integration of III-V semiconductors on silicon through Ge|Si virtual substrates has shown significant potential. Conventional methods typically employ relatively thick Ge layers (several microns) to produce surfaces with low defect densities, though these layers introduce constraints—particularly the risk of cracking—due to the differing thermal expansion coefficients between Si, Ge, and subsequent III-V materials. A novel approach was developed to alleviate thermal strain by drastically reducing the Ge layer thickness (<200  nm) and deposition temperature (<250 °C) using PECVD. Remarkably low threading dislocation densities (∼106 cm−2) were reported for these substrates, making them attractive for III-V growth. However, the integration of III-V materials on these substrates has yielded devices with subpar performance, especially in photovoltaic applications. The origin of these defects may lie in the Ge|Si substrates or arise during subsequent III-V growth via MOVPE. This study investigates the reasons why ultrathin Ge|Si virtual substrates have yet to produce high-performance solar cells. To this end, a comprehensive set of Ga(In)As/Ge|Si structures was fabricated and analyzed in depth using SEM, TEM, and AFM. Results reveal that defects initiate at the Ge|Si interface and propagate throughout the III-V layers, with Ge layer thickness in the range from 20 to 120 nm having minimal impact on defect formation. Furthermore, the MOVPE process for III-V growth was found to have a limited effect on the structural integrity of the substrates. Our findings suggest that, while ultrathin Ge|Si virtual substrates may not currently be suitable for high-efficiency III-V solar cells, they could still be viable for other optoelectronic devices less dependent on minority carrier properties.
通过Ge|Si虚拟衬底在硅上集成III-V半导体显示出巨大的潜力。传统的方法通常采用相对较厚的锗层(几微米)来生产低缺陷密度的表面,尽管由于Si、Ge和随后的III-V材料之间的热膨胀系数不同,这些层引入了限制,特别是裂纹的风险。开发了一种新的方法,通过使用PECVD大幅降低Ge层厚度(200 nm)和沉积温度(250°C)来减轻热应变。据报道,这些衬底的螺纹位错密度非常低(~ 106 cm−2),使它们适合III-V型生长。然而,在这些基板上集成III-V材料会产生性能欠佳的器件,特别是在光伏应用中。这些缺陷的来源可能是Ge|Si衬底,或者是在随后的III-V型生长过程中通过MOVPE产生的。本研究探讨了超薄锗|硅虚拟衬底尚未生产高性能太阳能电池的原因。为此,制作了一套完整的Ga(In)As/Ge|Si结构,并使用SEM, TEM和AFM进行了深入分析。结果表明,缺陷起源于Ge|Si界面,并扩展到整个III-V层,在20 ~ 120 nm范围内的Ge层厚度对缺陷形成的影响最小。此外,发现用于III-V生长的MOVPE工艺对衬底结构完整性的影响有限。我们的研究结果表明,虽然超薄Ge|Si虚拟衬底目前可能不适合高效率的III-V型太阳能电池,但它们仍然可以用于其他较少依赖少数载流子特性的光电器件。
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引用次数: 0
Status and new features of the topography beamline 1-BM after the Advanced Photon Source upgrade 先进光子源升级后地形波束线1-BM的现状及新特点
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-07 DOI: 10.1016/j.jcrysgro.2026.128488
XianRong Huang, Lahsen Assoufid
The beamline 1-BM of the Advanced Photon Source (APS), a bending-magnet beamline with an effective X-ray beam size of ∼100×4 mm2, has relatively comprehensive synchrotron topography and rocking curve imaging capabilities for characterization of crystals (particularly wide-bandgap semiconductors SiC, AlN, GaN, Ga2O3 etc). It is equipped with a white-beam topography stage for imaging large wafers up to 8 in.. It also has a double-crystal setup, of which the second stage can be used for monochromatic-beam topography. The first stage has different beam conditioners in the grazing-incidence geometry that can expand the vertical beam size from 4 to ∼100 mm for double-crystal rocking curve imaging when it is combined with the second stage. Recently APS has been upgraded to a modern 4th-generation light source, and 1-BM has been recommissioned to its normal operation for general users with better performance. The upgraded APS leads to new features at 1-BM. The much smaller source size and higher X-ray coherence significantly improve the image resolution and contrast. The higher flux and brightness of the new source reduce exposure time, which mitigates the mechanical drifting and vibration issues. Here the main capabilities and status of 1-BM together with these new features are introduced.
先进光子源(APS)的波束线1-BM是一条弯曲磁铁波束线,有效x射线束尺寸为~ 100×4 mm2,具有相对全面的同步加速器地形和摇摆曲线成像能力,可用于表征晶体(特别是宽带隙半导体SiC, AlN, GaN, Ga2O3等)。它配备了一个白束地形舞台,用于成像高达8英寸的大型晶圆。它还具有双晶设置,其中第二级可用于单色光束地形。第一级在掠入射几何形状中具有不同的光束调理器,当它与第二级结合时,可以将垂直光束尺寸从4扩展到~ 100 mm,用于双晶摇摆曲线成像。最近APS已升级为现代化的第四代光源,1-BM已重新投入使用,为普通用户提供性能更好的正常运行。升级后的APS将带来1-BM的新功能。更小的光源尺寸和更高的x射线相干性显著提高了图像分辨率和对比度。新光源的高通量和亮度减少了曝光时间,从而减轻了机械漂移和振动问题。这里介绍了1-BM的主要功能和现状以及这些新特性。
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引用次数: 0
Si (Mg) doping in β-Ga2O3 crystals by edge-defined film-fed growth: A comparative analysis of microstructure, bandgap, and temperature-dependent properties Si (Mg)掺杂在β-Ga2O3晶体中的边缘薄膜生长:微观结构、带隙和温度依赖特性的比较分析
IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY Pub Date : 2026-01-06 DOI: 10.1016/j.jcrysgro.2026.128487
Wei Hu , Guang Wen , Rongcheng Yao , Shuixiu Lin , Lingyu Wan , Shengnan Zhang , Yinming Wang , Manika Tun Nafisa , Zhe Chuan Feng , Benjamin Klein , Ian T. Ferguson
Systematic investigations of microstructure, the optical properties, band gap and variable temperature behaviors are conducted comparatively for Si/Mg-doped β-Ga2O3 crystals by edge-defined film-fed growth (EFG). The X-ray diffraction results revealed that compared with unintentionally doped β-Ga2O3 single crystals, Si doping led to a decrease in the interplanar spacing of the (400), (600), and (800) crystal planes in β-Ga2O3 single crystals, while Mg doping resulted in an increase in their interplanar spacing. Through a comprehensive analysis of the dataset of Room-temperature photoluminescence (PL), we identified that the defect-related luminescence of the two samples exhibited significantly changed. For the Si-doped sample, the PL blue emission was strong while the red emission was weak; in contrast, the Mg-doped sample showed the opposite trend, with strong red emission and weak blue emission, accompanied by multiple narrow-band red luminescence peaks. Variable-temperature photoluminescence (PL) results showed that the luminescence peak position of Si-doped β-Ga2O3 first redshifted and then blue shifted with increasing temperature, while the luminescence peak position and intensity of the Mg-doped sample exhibited a monotonous decreasing trend. Further analysis revealed that Si doping reduced the band gap, with the Fermi level moving closer to the conduction band bottom; in contrast, Mg doping increased the band gap, causing the Fermi level to shift toward the middle of the band gap. Under the variable-temperature condition from 10 K to 300 K, the temperature-dependent variation of the band gap conforms to the Varshni formula.
采用边缘定义薄膜生长法(EFG)对Si/ mg掺杂β-Ga2O3晶体的微观结构、光学性质、带隙和变温行为进行了系统的研究。x射线衍射结果表明,与无意掺杂β-Ga2O3单晶相比,Si掺杂导致β-Ga2O3单晶(400)、(600)和(800)晶面间距减小,而Mg掺杂导致其晶面间距增大。通过对室温光致发光(PL)数据集的综合分析,我们发现两种样品的缺陷相关发光表现出明显的变化。对于si掺杂样品,PL蓝色发射强,红色发射弱;而mg掺杂样品则表现出相反的趋势,红色发射强,蓝色发射弱,并伴有多个窄带红色发光峰。变温光致发光(PL)结果表明,随着温度的升高,si掺杂β-Ga2O3的发光峰位置先红移后蓝移,而mg掺杂样品的发光峰位置和强度呈单调下降趋势。进一步分析表明,Si掺杂减小了带隙,费米能级向导带底部移动;相反,Mg掺杂增加了带隙,导致费米能级向带隙中间偏移。在10 ~ 300 K的变温条件下,带隙随温度的变化符合Varshni公式。
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Journal of Crystal Growth
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