CVD graphene-MoS2 Van der Waals heterostructures on the millimeter-scale

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Micro and Nano Engineering Pub Date : 2024-04-28 DOI:10.1016/j.mne.2024.100256
Nico Rademacher , Eros Reato , Lukas Völkel , Annika Grundmann , Michael Heuken , Holger Kalisch , Andrei Vescan , Alwin Daus , Max C. Lemme
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Abstract

This study investigates the interactions between chemical vapor-deposited graphene and metal-organic chemical vapor-deposited molybdenum disulfide (MoS2) in heterostructures assembled via wet transfer. We use Raman spectroscopy to quantitatively determine close coupling between graphene and MoS2 based on the peak separations in graphene. Although annealing seems to be necessary after transfer to establish a close coupling, its parameters do not have a significant impact on the quality of coupling (for 100 °C < T < 400 °C and 5 min < t < 120 min). Furthermore, the method is robust against variations in graphene thickness because bilayers can be distinguished by comparing the full width at half maximum of the graphene 2D peak. We expand our study to mm2-scale areas of graphene-MoS2 heterostructures finding that films assembled via wet-transfer technique exhibit considerable variability in terms of coupling strength. Evaluating such interactions in heterostructures on large areas is important for future practical applications in heterostructure devices.

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毫米尺度的 CVD 石墨烯-MoS2 范德华异质结构
本研究探讨了化学气相沉积石墨烯和金属有机化学气相沉积二硫化钼(MoS2)在通过湿转移组装的异质结构中的相互作用。我们利用拉曼光谱,根据石墨烯的峰值分离来定量确定石墨烯和 MoS2 之间的紧密耦合。虽然在转移后似乎需要退火才能建立紧密耦合,但退火参数对耦合质量的影响并不大(100 °C < T < 400 °C 和 5 分钟 < t < 120 分钟)。此外,该方法对石墨烯厚度的变化也很稳健,因为通过比较石墨烯二维峰的半最大全宽,就可以区分双层石墨烯。我们将研究扩展到毫米级的石墨烯-MoS2 异质结构区域,发现通过湿转移技术组装的薄膜在耦合强度方面表现出相当大的差异。评估大面积异质结构中的这种相互作用对于未来异质结构器件的实际应用非常重要。
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来源期刊
Micro and Nano Engineering
Micro and Nano Engineering Engineering-Electrical and Electronic Engineering
CiteScore
3.30
自引率
0.00%
发文量
67
审稿时长
80 days
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